High-precision non-contact profile measurement for spherical surfaces and aspherical surfaces

Using the advantage of white-light interferometric technique, a new method for the optical non-contact profile measurements of spherical surface and aspherical surface based on image orientation technology is presented in this paper. In this method, a new system uses the grating sensors and piezoelectric transducer to control the motion of the objects, and utilizes the vertical scanning interferometric techniques to achieve the large-range profile measurement for spherical surface and aspherical surfaces.