Neural network classification of photoemission spectra

被引：5

作者：

Frank, S ^{[1
]}

机构：

[1] Texas Instruments Inc, Dallas, TX 75243 USA

来源：

40TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM | 2002年

关键词：

D O I：

10.1109/RELPHY.2002.996637

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

While the relationship between photoemission spectra and defects in integrated circuits has been well documented, the routine use of photoemission spectroscopy has been hampered by the difficulty of classifying the spectrum in the presence of noise. This paper proposes a neural network solution to this problem.

引用

页码：205 / 209

页数：5

共 11 条

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