Tracking laser interferometer for coordinate metrology

被引：6

作者：

Härtig, F ^{[1
]}

Keck, C ^{[1
]}

Kniel, K ^{[1
]}

Schwenke, H ^{[1
]}

Wäldele, F ^{[1
]}

Wendt, K ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-38118 Braunschweig, Germany

来源：

TECHNISCHES MESSEN | 2004年 / 71卷 / 04期

关键词：

coordinate measuring machine; lasertracker; gear measurement; laser interferometry;

D O I：

10.1524/teme.71.4.227.30458

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The accuracy of coordinate measuring machines (CMM) can be improved considerably by integrating a tracking laser interferometer. This novel measurement approach developed by the Physikalisch-Technische Bundesanstalt (PTB) combines the three coordinates of each determined measuring point of the CMM with a highly accurate interferometric length information. The crucial component is the tracking laser interferometer which has been developed by the PTB. Its design allows to carry out highly accurate distance measurements in space. Simulation and first measurement results verify the novel approach.

引用

页码：227 / 232

页数：6

共 7 条

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[3]

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[5]

Wendt K., 2001, Proceedings of the euspen. 2nd International Conference, P258

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[7]

2001, AGMA FALL TECHN M DE

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