Porosity Control in Thin Film Solar Cells: Two-Dimensional Case

被引：0

作者：

Huang, Jianqiao ^{[1
]}

Orkoulas, Gerassimos ^{[1
]}

Christofides, Panagiotis D. ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Chem & Biomol Engn, Los Angeles, CA 90095 USA

来源：

2013 AMERICAN CONTROL CONFERENCE (ACC) | 2013年

关键词：

MONTE-CARLO-SIMULATION; POROUS SILICON LAYER; SURFACE-MORPHOLOGY; LIGHT-SCATTERING; DEPOSITION; GROWTH; SI; MODEL;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.

引用

页码：1620 / 1625

页数：6

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