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Porosity Control in Thin Film Solar Cells: Two-Dimensional Case
被引:0
作者:
Huang, Jianqiao
[1
]
Orkoulas, Gerassimos
[1
]
Christofides, Panagiotis D.
[1
]
机构:
[1] Univ Calif Los Angeles, Dept Chem & Biomol Engn, Los Angeles, CA 90095 USA
来源:
2013 AMERICAN CONTROL CONFERENCE (ACC)
|
2013年
关键词:
MONTE-CARLO-SIMULATION;
POROUS SILICON LAYER;
SURFACE-MORPHOLOGY;
LIGHT-SCATTERING;
DEPOSITION;
GROWTH;
SI;
MODEL;
D O I:
暂无
中图分类号:
TP [自动化技术、计算机技术];
学科分类号:
0812 ;
摘要:
This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.
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页码:1620 / 1625
页数:6
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