Porosity Control in Thin Film Solar Cells: Two-Dimensional Case

被引：0
作者：
Huang, Jianqiao [1 ]
Orkoulas, Gerassimos [1 ]
Christofides, Panagiotis D. [1 ]
机构：
[1] Univ Calif Los Angeles, Dept Chem & Biomol Engn, Los Angeles, CA 90095 USA
来源：
2013 AMERICAN CONTROL CONFERENCE (ACC) | 2013年
关键词：
MONTE-CARLO-SIMULATION; POROUS SILICON LAYER; SURFACE-MORPHOLOGY; LIGHT-SCATTERING; DEPOSITION; GROWTH; SI; MODEL;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.
引用
收藏
页码：1620 / 1625
页数：6
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