S-shaped magnetic macroparticle filter for cathodic arc deposition

被引：59
作者：
Anders, S
Anders, A
Dickinson, MR
MacGill, RA
Brown, IG
机构：
[1] Lawrence Berkeley National Laboratory, University of California, Berkeley
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 1997年 / 25卷 / 04期
关键词：
films; filtering; plasma generation; vacuum arcs;
D O I：
10.1109/27.640683
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A new magnetic macroparticle fitter design consisting of two 90 degrees filters forming an S shape is described, The transport properties of this S filter are investigated using Langmuir and deposition probes, It is shown that the filter efficiency is the product of the efficiencies of two 90 degrees filters, and the deposition rate is still acceptably high to perform thin-film deposition, Films of amorphous hard carbon have been deposited using a 90 degrees filter and the S filter, and the macroparticle contents of the firms are compared.
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收藏
页码：670 / 674
页数：5
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