Silicon:germanium-based mixed-signal technology for optimization of wired and wireless telecommunications

被引:45
作者
Meyerson, BS [1 ]
机构
[1] IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1147/rd.443.0391
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
The need to serve the explosion in data bandwidth demand for fixed and mobile applications has driven transistor performance requirements beyond the reach of conventional silicon devices. Scaling limits of silicon-based bipolar transistors have been encountered, confining further performance gains by traditional means, but cost considerations favor the continued use of silicon-derived technology solutions. Silicon: germanium (Si:Ge) heterojunction bipolar transistors (HBTs) and subsequent generations of highly integrated SiGe BICMOS processes stem from long-term efforts initiated at IBM to develop such a silicon-derived technology. This paper reviews the application-driven origins of this SiGe technology, how it has evolved, and how limits to conventional silicon bipolar scaling have enhanced its adoption in the semiconductor industry. Examples of the entry of this technology into commercial applications in the wired and wireless marketplace are discussed.
引用
收藏
页码:391 / 407
页数:17
相关论文
共 37 条
[1]   Manufacturability demonstration of an integrated SiGe HBT technology for the analog and wireless marketplace [J].
Ahlgren, DC ;
Gilbert, M ;
Greenberg, D ;
Jeng, SJ ;
Malinowski, J ;
NguyenNgoc, D ;
Schonenberg, K ;
Stein, K ;
Groves, R ;
Walter, K ;
Hueckel, G ;
Colavito, D ;
Freeman, G ;
Sunderland, D ;
Harame, DL ;
Meyerson, B .
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, :859-862
[2]  
ALFERNESS RC, 1995, P EUR C INT OPT 95, P245
[3]   High speed P-type SiGe modulation-doped field-effect transistors [J].
Arafa, M ;
Fay, P ;
Ismail, K ;
Chu, JO ;
Meyerson, BS ;
Adesida, I .
IEEE ELECTRON DEVICE LETTERS, 1996, 17 (03) :124-126
[4]  
BURGHATZ JN, 1997, IEEE J SOLID-ST CIRC, V32, P9
[5]  
CLARK P, 1999, EE TIMES ONLINE 0823
[6]  
Crabbe E. F., 1993, International Electron Devices Meeting 1993. Technical Digest (Cat. No.93CH3361-3), P83, DOI 10.1109/IEDM.1993.347393
[7]   73-GHZ SELF-ALIGNED SIGE-BASE BIPOLAR-TRANSISTORS WITH PHOSPHORUS-DOPED POLYSILICON EMITTERS [J].
CRABBE, EF ;
COMFORT, JH ;
LEE, W ;
CRESSLER, JD ;
MEYERSON, BS ;
MEGDANIS, AC ;
SUN, JYC ;
STORK, JMC .
IEEE ELECTRON DEVICE LETTERS, 1992, 13 (05) :259-261
[8]   Low-frequency noise characteristics of UHV/CVD epitaxial Si- and SiGe-base bipolar transistors [J].
Cressler, JD ;
Vempati, L ;
Babcock, JA ;
Jaeger, RC ;
Harame, DL .
IEEE ELECTRON DEVICE LETTERS, 1996, 17 (01) :13-15
[9]   DESIGN OF ION-IMPLANTED MOSFETS WITH VERY SMALL PHYSICAL DIMENSIONS [J].
DENNARD, RH ;
GAENSSLEN, FH ;
YU, HN ;
RIDEOUT, VL ;
BASSOUS, E ;
LEBLANC, AR .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1974, SC 9 (05) :256-268
[10]   RFIC's for mobile communication systems using SiGe bipolar technology [J].
Gotzfried, R ;
Beisswanger, F ;
Gerlach, S ;
Schuppen, A ;
Dietrich, H ;
Seiler, U ;
Bach, KH ;
Albers, J .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1998, 46 (05) :661-668