Study on Structural, Optical and Wettable Properties of CeO2 Thin Films Deposited by Reactive DC Magnetron Sputtering

被引：4

作者：

Jain, Ravish K. ^{[1
]}

Kaur, Gurjinder ^{[1
]}

Chauhan, Samta ^{[1
]}

Gautam, Yogendra K. ^{[1
]}

Chandra, Ramesh ^{[1
]}

机构：

[1] IIT Roorkee, Inst Instrumentat Ctr, Nanosci Lab, Roorkee, Uttar Pradesh, India

来源：

OPTOELECTRONIC MATERIALS AND THIN FILMS (OMTAT 2013) | 2014年 / 1576卷

关键词：

DC reactive sputtering; optical coating; XRD; Contact angle goniometer; UV-Vis spectrophotometer; SUBSTRATE DISTANCE; GROWTH; ORIENTATION; THICKNESS; SURFACES; TARGET; LAYERS;

D O I：

10.1063/1.4862008

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

CeO2 thin films have been deposited on different substrates (Si & quartz) by reactive DC magnetron sputtering technique and effect of target-substrate distance (dT-S) on structural, optical, and wettable properties has been investigated. XRD data reveals that CeO2 films are polycrystalline in nature with cubic structure. Variation in growth rates of different orientations with change in d(T-S) has been observed. Evolution of (200) peak for the film deposited on Si substrate confirms the substrate dependence of the texture. Surface morphology of the films has been characterized by AFM. Wettability and optical properties have been studied using contact angle goniometer and UV-Vis spectrophotometer, respectively. CeO2 films deposited at 5 cm d(T-S) have least transmittacnce but highest hydrophobicity among all the studied samples.

引用

页码：155 / 158

页数：4

共 27 条

[1] Fundamental structure forming phenomena of polycrystalline films and the structure zone models [J].

Barna, PB ;

Adamik, M .

THIN SOLID FILMS, 1998, 317 (1-2) :27-33

[2] Self-cleaning surfaces - virtual realities [J].

Blossey, R .

NATURE MATERIALS, 2003, 2 (05) :301-306

[3] Optical and structural characterization of rf sputtered CeO2 thin films [J].

Bueno, RM ;

MartinezDuart, JM ;

HernandezVelez, M ;

Vazquez, L .

JOURNAL OF MATERIALS SCIENCE, 1997, 32 (07) :1861-1865

[4] Optical and mechanical performance of nanostructured cerium oxides for applications in optical devices [J].

Charitidis, C ;

Patsalas, P ;

Logothetidis, S .

SECOND CONFERENCE ON MICROELECTRONICS, MICROSYSTEMS AND NANOTECHNOLOGY, 2005, 10 :226-229

[5] Structural Characterizations and Optical Properties of CeO2 Thin Films Prepared by Laser Molecular-Beam Epitaxy [J].

Chen, Jun ;

Meng, Daqiao .

INTEGRATED FERROELECTRICS, 2012, 138 :145-151

[6] Optical properties of CeO2 thin films [J].

Debnath, S. ;

Islam, M. R. ;

Khan, M. S. R. .

BULLETIN OF MATERIALS SCIENCE, 2007, 30 (04) :315-319

[7] Thickness dependence of structural, optical and electrical properties of ZnO:Al films prepared on flexible substrates [J].

Hao, XT ;

Ma, J ;

Zhang, DH ;

Yang, TL ;

Ma, HL ;

Yang, YG ;

Cheng, CF ;

Huang, J .

APPLIED SURFACE SCIENCE, 2001, 183 (1-2) :137-142

[8] Characterization of orientation-selective-epitaxial CeO2 layers on Si(100) substrates by x-ray diffraction and cross-sectional transmission electron microscopy [J].

Inoue, Tomoyasu ;

Nakata, Yoshiyuki ;

Shida, Shigenari ;

Kato, Kazuhiro .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (04) :1128-1132

[9] Effects of deposition parameters on the crystallinity of CeO2 thin films deposited on Si(100) substrates by r.f-magnetron sputtering [J].

Kim, LJ ;

Kim, JM ;

Jung, DG ;

Park, CY ;

Yang, CW ;

Roh, YH .

THIN SOLID FILMS, 2000, 360 (1-2) :154-158

[10] Structural and morphological characterisation of heteroepitaxial CeO2 films grown on YSZ (100) and TiO2 (001) by metal-organic chemical vapour deposition [J].

Lo Nigro, R ;

Malandrino, G ;

Fragalà, IL .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2003, 102 (1-3) :323-326

← 1 2 3 →