Study on Structural, Optical and Wettable Properties of CeO2 Thin Films Deposited by Reactive DC Magnetron Sputtering

被引：4
|
作者：
Jain, Ravish K. [1 ]
Kaur, Gurjinder [1 ]
Chauhan, Samta [1 ]
Gautam, Yogendra K. [1 ]
Chandra, Ramesh [1 ]
机构：
[1] IIT Roorkee, Inst Instrumentat Ctr, Nanosci Lab, Roorkee, Uttar Pradesh, India
来源：
OPTOELECTRONIC MATERIALS AND THIN FILMS (OMTAT 2013) | 2014年 / 1576卷
关键词：
DC reactive sputtering; optical coating; XRD; Contact angle goniometer; UV-Vis spectrophotometer; SUBSTRATE DISTANCE; GROWTH; ORIENTATION; THICKNESS; SURFACES; TARGET; LAYERS;
D O I：
10.1063/1.4862008
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
CeO2 thin films have been deposited on different substrates (Si & quartz) by reactive DC magnetron sputtering technique and effect of target-substrate distance (dT-S) on structural, optical, and wettable properties has been investigated. XRD data reveals that CeO2 films are polycrystalline in nature with cubic structure. Variation in growth rates of different orientations with change in d(T-S) has been observed. Evolution of (200) peak for the film deposited on Si substrate confirms the substrate dependence of the texture. Surface morphology of the films has been characterized by AFM. Wettability and optical properties have been studied using contact angle goniometer and UV-Vis spectrophotometer, respectively. CeO2 films deposited at 5 cm d(T-S) have least transmittacnce but highest hydrophobicity among all the studied samples.
引用
收藏
页码：155 / 158
页数：4
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