A 3-axis force balanced accelerometer using a single proof-mass

被引：0
|
作者：
Lemkin, MA
Boser, BE
Auslander, D
Smith, JH
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
three-axis accelerometer; sigma-delta;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time Proof of concept is experimentally with a single-mass monolithic surface micromachined 3-axis accelerometer.
引用
收藏
页码：1185 / 1188
页数：4
相关论文
共 50 条
  • [41] Economic MEMS based 3-axis water proof accelerometer for dynamic geo-engineering applications
    Bhattacharya, Subhamoy
    Krishna, A. Murali
    Lombardi, Domenico
    Crewe, Adam
    Alexander, Nick
    SOIL DYNAMICS AND EARTHQUAKE ENGINEERING, 2012, 36 : 111 - 118
  • [42] Accurate Fall Detection Using 3-Axis Accelerometer Sensor And MLF Algorithm
    Jahanjoo, Anice
    Tahan, Marjan Naderan
    Rashti, Mohammad Javad
    2017 3RD INTERNATIONAL CONFERENCE ON PATTERN RECOGNITION AND IMAGE ANALYSIS (IPRIA), 2017, : 90 - 95
  • [43] Evaluation of ruminal motility using an indwelling 3-axis accelerometer in the reticulum in cattle
    Choi, Woojae
    Ro, Younghye
    Hong, Leegon
    Ahn, Sunmin
    Kim, Heejin
    Choi, Changhyuk
    Kim, Hakseung
    Kim, Danil
    JOURNAL OF VETERINARY MEDICAL SCIENCE, 2020, 82 (12): : 1750 - 1756
  • [44] ADL Monitoring System Using FSR Arrays and Optional 3-Axis Accelerometer
    Kim, Minho
    Jang, Jaewon
    Song, Sa-kwang
    Jung, Ho-Youl
    Park, Seon-Hee
    Park, Soo-Jun
    AMBIENT ASSISTIVE HEALTH AND WELLNESS MANAGEMENT IN THE HEART OF THE CITY, PROCEEDING, 2009, 5597 : 217 - 224
  • [45] A Comparative Study of Classification Methods for Gesture Recognition using a 3-axis Accelerometer
    Moiz, Fahad
    Natoo, Prasad
    Derakhshani, Reza
    Leon-Salas, Walter D.
    2011 INTERNATIONAL JOINT CONFERENCE ON NEURAL NETWORKS (IJCNN), 2011, : 2479 - 2486
  • [46] A Method for Estimating Text Neck While Walking Using a 3-axis Accelerometer
    Nguyen, M. T.
    Dang, Q. K.
    Suh, Y. S.
    Chee, Y. J.
    2017 IEEE 14TH INTERNATIONAL CONFERENCE ON WEARABLE AND IMPLANTABLE BODY SENSOR NETWORKS (BSN), 2017, : 23 - 26
  • [47] Early recognition of regional cardiac ischemia using a 3-axis accelerometer sensor
    Elle, OJ
    Halvorsen, S
    Gulbrandsen, MG
    Aurdal, L
    Bakken, A
    Samset, E
    Dugstad, H
    Fosse, E
    PHYSIOLOGICAL MEASUREMENT, 2005, 26 (04) : 429 - 440
  • [48] A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing
    Koga, Tatsuya
    Ichikawa, Takashi
    Yamane, Daisuke
    Iida, Shinichi
    Ishihara, Noboru
    Ito, Hiroyuki
    Machida, Katsuyuki
    Masu, Kazuya
    2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020), 2020,
  • [49] IMPLEMENTATION OF FULLY-DIFFERENTIAL CAPACITANCE SENSING ACCELEROMETER USING GLASS PROOF-MASS WITH SI-VIAS
    Hsu, Yi-Chang
    Lin, Chiung-Wen
    Sun, Chih-Ming
    Hsu, Chia-Pao
    Lee, Yu-Tao
    Tsai, Ming-Han
    Liu, Yu-Chia
    Fang, Weileun
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 589 - 592
  • [50] Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer
    Ahmed, Aftab
    Pandit, Shardul
    Patkar, Rajul
    Dixit, Pradeep
    Baghini, Maryam Shojaei
    Khlifi, Awatef
    Tounsi, Fares
    Mezghani, Brahim
    2019 16TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS & DEVICES (SSD), 2019, : 131 - 136
12345