共 22 条
[1]
Afanas'ev VV, 1997, PHYS STATUS SOLIDI A, V162, P321, DOI 10.1002/1521-396X(199707)162:1<321::AID-PSSA321>3.0.CO
[2]
2-F
[3]
[Anonymous], P INT S POW DEV ICS
[5]
Characterization of 2D dopant profiles for the design of proton implanted high-voltage superjunction
[J].
IPFA 2005: PROCEEDINGS OF THE 12TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS,
2005,
:285-289
[6]
2D junction delineation for the failure analysis of silicon carbide devices
[J].
IPFA 2005: Proceedings of the 12th International Symposium on the Physical & Failure Analysis of Integrated Circuits,
2005,
:105-109
[7]
Buzzo M, 2004, MICROELECTRON RELIAB, V44, P1681, DOI [10.1016/j.microrel.2004.07.053, 10.1016/j.microlrel.2004.07.053]
[8]
BUZZO M, P ICSCRM PITTSB PA
[9]
CIAMPOLINI L, 2000, P AIP C CHAR METR UL, V550, P647
[10]
Assessing the performance of two-dimensional dopant profiling techniques
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2004, 22 (01)
:385-393