Lens-on-lens microstructures

被引：25

作者：

Yang, Qing ^{[1
,2
]}

Tong, Siyu ^{[1
,2
]}

Chen, Feng ^{[1
,3
]}

Deng, Zefang ^{[1
,3
]}

Bian, Hao ^{[1
,3
]}

Du, Guangqing ^{[1
,3
]}

Yong, Jiale ^{[1
,3
]}

Hou, Xun ^{[3
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China

[2] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Shaanxi, Peoples R China

[3] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Key Lab Photon Technol Informat, Xian 710049, Shaanxi, Peoples R China

来源：

OPTICS LETTERS | 2015年 / 40卷 / 22期

基金：

中国国家自然科学基金;

关键词：

MICROLENS ARRAYS; FABRICATION; SILICA;

D O I：

10.1364/OL.40.005359

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Microlenses with multiple focal lengths play an important role in three-dimensional imaging and the real-time detection of unconfined or fluctuating targets. In this Letter, we present a novel method of fabricating lens-on-lens microstructures (LLMs) using a two-step femtosecond laser wet etching process. A 3 x 3 LLM array was made with a diameter of 129.0 mu m. The fabricated LLM has two focal lengths, 80.4 and 188.7 mu m, showing excellent two-level focusing and imaging abilities. Its size and focal length can be controlled by adjusting laser power and etching time. Its surface roughness remains about 61 nm. This simple and efficient method for large-scale production of LLMs has potential applications in diverse optical systems. (C) 2015 Optical Society of America

引用

页码：5359 / 5362

页数：4

共 17 条

[1] Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method [J].

Chen, Feng ;

Liu, Hewei ;

Yang, Qing ;

Wang, Xianhua ;

Hou, Cong ;

Bian, Hao ;

Liang, Weiwei ;

Si, Jinhai ;

Hou, Xun .

OPTICS EXPRESS, 2010, 18 (19) :20334-20343

[2] Laser precision engineering: from microfabrication to nanoprocessing [J].

Chong, Tow C. ;

Hong, Minghui H. ;

Shi, Luping P. .

LASER & PHOTONICS REVIEWS, 2010, 4 (01) :123-143

[3] Microplate cell-retaining methodology for high-content analysis of individual non-adherent unanchored cells in a population [J].

Deutsch, Assaf ;

Zurgil, Naomi ;

Hurevich, Ihar ;

Shafran, Yana ;

Afrimzon, Elena ;

Lebovich, Pnina ;

Deutsch, Mordechai .

BIOMEDICAL MICRODEVICES, 2006, 8 (04) :361-374

[4] Extended focus diffractive optical element for Gaussian laser beams [J].

Golub, MA ;

Shurman, V ;

Grossinger, I .

APPLIED OPTICS, 2006, 45 (01) :144-150

[5] Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica [J].

He, Shengguan ;

Chen, Feng ;

Liu, Keyin ;

Yang, Qing ;

Liu, Hewei ;

Bian, Hao ;

Meng, Xiangwei ;

Shan, Chao ;

Si, Jinhai ;

Zhao, Yulong ;

Hou, Xun .

OPTICS LETTERS, 2012, 37 (18) :3825-3827

[6] Dual focus optical head with a hologram-integrated lens [J].

Komma, Y ;

Tanaka, Y ;

Urairi, K ;

Nishino, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1B) :474-480

[7] Efficiency improvement and image quality of organic light-emitting display by attaching cylindrical microlens arrays [J].

Lee, Jiun-Haw ;

Ho, Yu-Hsuan ;

Chen, Kuan-Yu ;

Lin, Hoang-Yan ;

Fang, Jheng-Hao ;

Hsu, Sheng-Chih ;

Lin, Jia-Rong ;

Wei, Mao-Kuo .

OPTICS EXPRESS, 2008, 16 (26) :21184-21190

[8] Single-step fabrication of Fresnel microlens array on sapphire substrate of flip-chip gallium nitride light emitting diode by focused ion beam [J].

Lee, Ming-Kwei ;

Kuo, Kwei-Kuan .

APPLIED PHYSICS LETTERS, 2007, 91 (05)

[9] Liquid tunable double-focus lens fabricated with diamond cutting and soft lithography [J].

Leung, Hui Min ;

Zhou, Guangya ;

Yu, Hongbin ;

Chau, Fook Siong ;

Kumar, A. Senthil .

APPLIED OPTICS, 2009, 48 (30) :5733-5740

[10] Fabrication and Verification of a Small-Form-Factor Blue-Light Optical Pickup Head With Holographic Optical Element [J].

Lin, Yue-Jheng ;

Chiu, Yi ;

Shih, Hsi-Fu ;

Chiou, Jin-Chern .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2012, 30 (01) :38-42

← 1 2 →