Propagation of Laser-Induced Particles From Fused Silica

被引:3
作者
Peng Ge [1 ]
Lu Lihua [1 ]
Dong Zhe [1 ]
机构
[1] Harbin Inst Technol, Sch Mechatron Engn, Ctr Precis Engn, Harbin 150001, Heilongjiang, Peoples R China
来源
CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG | 2019年 / 46卷 / 04期
关键词
laser optics; laser-induced particles; fused silica; particulate propagation; pollutant distribution; damage; SURFACE CONTAMINATION; INDUCED DAMAGE; EXIT SURFACE; OPTICS; NANOPARTICLES; FEMTOSECOND; MECHANISMS; MORPHOLOGY; BREAKDOWN; ABLATION;
D O I
10.3788/CJL201916.0103001
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The propagation law of laser-induced particles in three-dimensional space is studied. The interaction of single pulse laser with fused silica can produce particles with diameter form 0.3 p.m to 10.0 p.m when the spot area is 0.8 mm2, laser splitting ratio is 25.1 and average energy is 8 m1. Most of these particles arc sprayed along the neutral surface with a large scattering angle, while their concentrations arc lessened from top to bottom. The proportion of particle sediments located at substrate is monotonically decreasing along the longitudinal ( reverse direction of incident light) and horizontal (vertical to direction of incident light) direction except for a local growth occurring at 120 mm and 360 mm in longitudinal direction. The distances of movement of particles arc inversely proportional to their diameters, and the particles with diameter of 0.3 mu m can achieve the distance no more than 622 mm.
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页数:7
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