REDUCED ORDER MODELLING IN A MEMS ARCH RESONATOR EXHIBITING 1:2 INTERNAL RESONANCE

A Model Order Reduction (MOR) technique based on the Implicit Condensation (IC) method has been recently proposed as a powerful tool able to predict a priori, i.e. without the need of experimental calibration of parameters, and in real-time, i.e. by solving one or two degrees-of-freedom system of equations, the nonlinear behavior of resonant Micro-Electro-Mechanical Systems (MEMS). In this work, the MOR technique is employed to predict the complex nonlinear dynamic response of a MEMS arch resonator exhibiting 1:2 internal resonance. Experiments match very well numerical predictions, thus proving great potential of the proposed approach for the simulation of highly nonlinear MEMS devices.