Effect of Annealing on the Structural, Magnetic, Surface Energy and Optical Properties of Co32Fe30W38 Films Deposited by Direct-Current Magnetron Sputtering

被引:8
作者
Liu, Wen-Jen [1 ]
Chang, Yung-Huang [2 ]
Ou, Sin-Liang [3 ]
Chen, Yuan-Tsung [4 ]
Li, Wei-Hsuan [4 ]
Jhou, Tian-Yi [4 ]
Chu, Chun-Lin [5 ]
Wu, Te-Ho [4 ]
Tseng, Shih-Wen [6 ]
机构
[1] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 840, Taiwan
[2] Natl Yunlin Univ Sci & Technol, Bachelor Program Interdisciplinary Studies, 123 Univ Rd,Sect 3, Touliu 64002, Yunlin, Taiwan
[3] Dayeh Univ, Bachelor Program Design & Mat Med Equipment & Dev, Changhua 51591, Taiwan
[4] Natl Yunlin Univ Sci & Technol, Grad Sch Mat Sci, 123 Univ Rd,Sect 3, Touliu 64002, Yunlin, Taiwan
[5] Taiwan Semicond Res Inst, Natl Appl Res Labs, Hsinchu 30078, Taiwan
[6] Natl Cheng Kung Univ, Instrument Ctr, Tainan 70140, Taiwan
关键词
annealed Co32Fe30W38 thin films; low-frequency alternating current magnetic susceptibility (χ (ac)); optimal resonance frequency (f(res)); surface energy; transmittance; THERMAL-STABILITY; MICROSTRUCTURE; LAYER;
D O I
10.3390/coatings10111028
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, a 10-50 nm Co32Fe30W38 alloy thin film sputtered on glass substrates was annealed at different temperatures for 1 h including room temperature (RT), 300, 350, and 400 degrees C. The structure, magnetic properties, surface energy, and optical properties of the Co32Fe30W38 alloy were studied. X-ray diffraction (XRD) patterns of the as-deposited Co32Fe30W38 thin films showed the amorphous structure. The apparent body-centered cubic (BCC) CoFe (110) structure was exhibited after 300 degrees C annealing for 1 h. The 300 degrees C annealed Co32Fe30W38 thin film showed the highest CoFe (110) peak compared with other temperatures. Furthermore, the thicker the Co32Fe30W38 thin film, the higher the CoFe (110) peak. The CoFe (110) peak revealed magneto-crystalline anisotropy, which was related to the strong low-frequency alternative-current magnetic susceptibility (chi(ac)) and induced an increasing trend of saturation magnetization (M-s) as the thickness (t(f)) increased. Due to the thermal disturbance, the chi(ac) and M-s for the 350 and 400 degrees C annealed Co32Fe30W38 thin film decreased. The contact angles of the Co32Fe30W38 thin films were less than 90 degrees. For all temperatures, the surface energy increased when the film thickness increased from 10 to 50 nm. In addition, the surface energies for annealed samples were comparatively higher than the as-deposited samples. The higher surface energy of 28 mJ/mm(2) was obtained for the 50 nm Co32Fe30W38 thin film annealed at 300 degrees C. The transmittance percentage (%) of the as-deposited Co32Fe30W38 film was higher than other annealed conditions. This result contributed to the fact that higher crystallization, due to perfect band structures, may inhibit the transmission of photon signals through the film, resulting in low transmittance and high absorption.
引用
收藏
页码:1 / 13
页数:13
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