A multi-layer plastic packaging technology for miniaturized bio analysis systems containing integrated electrical and mechanical functionality

被引：2

作者：

Han, A ^{[1
]}

Wang, O ^{[1
]}

Mohanty, SK ^{[1
]}

Graff, M ^{[1
]}

Frazier, AB ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

2ND ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS | 2002年

关键词：

microfluidics; packaging; Bio-MEMS;

D O I：

10.1109/MMB.2002.1002266

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

A multi-layer plastic packaging technology has been developed for microfluidic systems containing electrical and mechanical functionality. Hot embossing and heat staking of plastics, micro stenciling of electrodes, and stereolithography (SLA) was combined with conventional MEMS fabrication techniques to realize the system. The approach allows for multiple materials of fabrication, provides a solution to integration of electrical functionality throughout the system, and provides an interconnect technology for interfacing fluids and electrical components between the macro and the micro worlds.

引用

页码：66 / 70

页数：5

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