Identification of the different diffuse dielectric barrier discharges obtained between 50 kHz to 9MHz in Ar/NH3 at atmospheric pressure

被引:50
作者
Bazinette, R. [1 ]
Subileau, R. [2 ]
Paillol, J. [2 ]
Massines, F. [1 ]
机构
[1] Lab Proc Mat & Energie Solaire, UPR 8521, F-66100 Tecnosud, Perpignan, France
[2] Univ Pau & Pays Adour, SIAME, F-64012 Pau, France
关键词
atmospheric-pressure glow discharge (APGD); atmospheric-pressure Townsend discharge (APTD); atmospheric-pressure radio-frequency discharge; alpha mode; noble gas DBD; PLASMA;
D O I
10.1088/0963-0252/23/3/035008
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The aim of this work was to identify the different diffuse dielectric barrier discharges (DBDs) obtained in the same electrode configuration and in the same gas for an excitation frequency ranging from 50 kHz to 9 MHz. The gas mixture was argon with 133 ppm of NH3. This Penning mixture is useful to obtain both low-frequency glow DBDs (GDBDs) and diffuse radio-frequency (RF) discharges. Electrical measurements and short exposure time photographs showed that whatever the frequency, a discharge free of micro-discharge was obtained. In the same configuration, the discharge was a GDBD up to 200 kHz. For frequencies higher than 250 kHz, the discharge behavior was that of a Townsend-like discharge associated with a maximum energy transfer close to the anode and a higher power ( about twice that of the GDBD). The cathode fall formation was no longer observed during the discharge current increase because of ion trapping in the gas gap by the rapid electric field oscillations. In the same configuration, the alpha RF mode was observed from 1.3 MHz. Gamma secondary electron emission gave way to electron acceleration by the cathode sheath formation. Bulk ionization was important due to the high electron collision rate at atmospheric pressure. One consequence of the transition from low-frequency to high-frequency discharge was a significant increase in the power (factor approximate to 30), which reached 35Wcm(-3), while the breakdown voltage decreased from 900V to less than 200V.
引用
收藏
页数:9
相关论文
共 30 条
  • [1] Phase resolved optical emission spectroscopy of coaxial microplasma jet operated with He and Ar
    Benedikt, J.
    Hofmann, S.
    Knake, N.
    Boettner, H.
    Reuter, R.
    von Keudell, A.
    Schulz-von der Gathen, V.
    [J]. EUROPEAN PHYSICAL JOURNAL D, 2010, 60 (03) : 539 - 546
  • [2] Berchtikou A, 2011, DIELECTRICS ELECT IN, P18
  • [3] Influence of gas flow dynamics on discharge stability and on the uniformity of atmospheric pressure PECVD thin film
    Caquineau, H.
    Enache, I.
    Gherardi, N.
    Naude, N.
    Massines, F.
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (12)
  • [4] Atmospheric pressure plasma of dielectric barrier discharges
    Chirokov, A
    Gutsol, A
    Fridman, A
    [J]. PURE AND APPLIED CHEMISTRY, 2005, 77 (02) : 487 - 495
  • [5] Mechanisms controlling the transition from glow silent discharge to streamer discharge in nitrogen
    Gherardi, N
    Massines, F
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2001, 29 (03) : 536 - 544
  • [6] Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas
    Hemke, T.
    Eremin, D.
    Mussenbrock, T.
    Derzsi, A.
    Donko, Z.
    Dittmann, K.
    Meichsner, J.
    Schulze, J.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2013, 22 (01)
  • [7] Electron kinetics in radio-frequency atmospheric-pressure microplasmas
    Iza, F.
    Lee, J. K.
    Kong, M. G.
    [J]. PHYSICAL REVIEW LETTERS, 2007, 99 (07)
  • [8] Atmospheric-pressure low-temperature plasma processes for thin film deposition
    Kakiuchi, Hiroaki
    Ohmi, Hiromasa
    Yasutake, Kiyoshi
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2014, 32 (03):
  • [9] An investigation of dielectric barrier discharge in Ar and Ar/NH3 mixture using cross-correlation spectroscopy
    Kloc, P.
    Wagner, H-E
    Trunec, D.
    Navratil, Z.
    Fedoseev, G.
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (34)
  • [10] A large gap of radio frequency dielectric barrier atmospheric pressure glow discharge
    Li, B.
    Chen, Q.
    Liu, Z. W.
    [J]. APPLIED PHYSICS LETTERS, 2010, 96 (04)