Pulsed laser assisted micro-scribing of PCB combined with LIBS based depth monitoring

被引：0

作者：

Sooraj, S. ^{[1
]}

Vasa, N. J. ^{[1
]}

机构：

[1] Indian Inst Technol Madras, Dept Engn Design, Chennai 600036, Tamil Nadu, India

来源：

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR) | 2020年

关键词：

D O I：

10.1364/CLEOPR.2020.C12A_1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A nanosecond laser ablation combined with LIBS is demonstrated for a micro-scribing of copper film on dielectric material. NaCl solution was used as a laser-activated etchant in the final scan for minimizing the thermal damage.

引用

页数：2

共 3 条

[1] Monitoring of the Femtosecond Laser Micromachining Process of Materials Immersed in Water by Use of Laser-Induced Breakdown Spectroscopy [J].

Baskevicius, Aurimas ;

Balachninaite, Ona ;

Karpavicius, Mykolas ;

Butkus, Simas ;

Paipulas, Domas ;

Sirutkaitis, Valdas .

JOURNAL OF LASER MICRO NANOENGINEERING, 2016, 11 (03) :381-387

[2] Resonance/non-resonance doublet-based self-absorption-free LIBS for quantitative analysis with a wide measurement range [J].

Hou, J. J. ;

Zhang, L. ;

Zhao, Y. ;

Ma, W. G. ;

Dong, L. ;

Yin, W. B. ;

Xiao, L. T. ;

Jia, S. T. .

OPTICS EXPRESS, 2019, 27 (03) :3409-3421

[3]

Lsakkiinuthii M, 2017, J LASER MICRO NANOEN, V12

← 1 →