A new approach mechanism for scanning probe microscope

被引:0
作者
Ng, K. -W. [1 ]
机构
[1] Univ Kentucky, Dept Phys & Astron, Lexington, KY 40506 USA
来源
WMSCI 2005: 9th World Multi-Conference on Systemics, Cybernetics and Informatics, Vol 8 | 2005年
关键词
scanning tunneling microscope; STM; scanning probe; SPM; coarse approach mechanism; walker;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
More than 20 years since the invention of scanning tunneling microscope (STM), many scanning probe techniques have been developed and established. Different sensing methods, like atomic force and near field light wave, are used in these scanning probe microscopes (SPM). Many of these SPMs require an approach mechanism to place the sensor close to the sample surface. The approach mechanism will directly affect the performance of an SMP. A bulky approach mechanism may reduce the rigidity of the SPM and lower the resonance frequency of the SPM [1]. A poorly designed approach mechanism may not provide the needed resolution and lead to frequent clashing between sensor and sample. In this paper I will discuss a compact design we use in our low temperature STM. The design is based on a piezoelectric tube moving inside a triangular prism shaped cavity. The approach mechanism works in any orientation from horizontal to vertical and its motion is found to be linear with the applied voltage above a threshold voltage. The STM size is reduced considerably by mounting the scanner tube inside of the approach mechanism tube.
引用
收藏
页码:367 / 371
页数:5
相关论文
共 6 条
[1]  
[Anonymous], 1993, INTRO SCANNING TUNNE
[2]   SCANNING TUNNELING MICROSCOPY - FROM BIRTH TO ADOLESCENCE [J].
BINNIG, G ;
ROHRER, H .
REVIEWS OF MODERN PHYSICS, 1987, 59 (03) :615-625
[3]   Imaging magnetic fields [J].
Kirtley, J .
IEEE SPECTRUM, 1996, 33 (12) :40-&
[4]  
Pan S. H., 1993, International Patent Publication No. patent, Patent No. [93/19494, 9319494]
[5]   OPTICAL STETHOSCOPY - IMAGE RECORDING WITH RESOLUTION LAMBDA/20 [J].
POHL, DW ;
DENK, W ;
LANZ, M .
APPLIED PHYSICS LETTERS, 1984, 44 (07) :651-653
[6]   ATOMIC POINT-CONTACT IMAGING [J].
SMITH, DPE ;
BINNIG, G ;
QUATE, CF .
APPLIED PHYSICS LETTERS, 1986, 49 (18) :1166-1168