RESEARCH ON MICRO-FABRICATED GAS CHROMATOGRAPHIC COLUMNS WITH EMBEDDED ELLIPITIC CYLINDRICAL POSTS

被引：0

作者：

Tian, Bowen ^{[1
]}

Feng, Fei ^{[1
]}

Hou, Lei ^{[1
]}

Luo, Fan ^{[1
]}

Li, Xinxin ^{[1
]}

Ge, Xiaohong ^{[1
]}

Wu, Yanhong ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China

来源：

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) | 2017年

基金：

中国国家自然科学基金; 国家高技术研究发展计划(863计划);

关键词：

STATIONARY-PHASE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a newly developed micro-fabricated gas chromatographic (mu GC) column with embedded elliptic cylindrical posts (ECP) in a silicon-glass architecture, which has higher surface area and less quasi-zero velocity zone compared to the state of the art. By coating polydimethylsiloxane as the stationary phase, the 2 m and 4 m columns can separate methane and ethane with 0.66 and 1.02 resolution.

引用

页码：1343 / 1346

页数：4

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