Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation

The ionization distribution of a small scale rotating cylindrical magnetron discharge is simulated by a Monte Carlo based program. The simulation describes the high energy electron trajectories and the interaction between these electrons and the sputtering gas, which finally leads to the ionization distribution. By radial projection of the ionization positions on the target surface, the erosion track dimensions can be correctly simulated. The discrepancy between the simulation and the experiments shows the need to modify the experimental design and to control the alignment between the central axis of the target tube and the magnet configuration in a better way.