In this paper, electrical contact surfaces are investigated to predict and visualize the contact length, contact pressure and indentation depth under applied force. CNT-CNT, Au-CNT, Au-Au, and Au/CNT-Au/CNT contact pairs have been considered for the analysis. Finite Element Modeling (FEM) and analysis is carried out for 2D, semi-circle-square microelectrical contact using COMSOL multiphysics simulation tool. Predicted values are compared with the Hertz model analytical calculations. Contact length and indentation depth of Au/CNT-Au/CNT > Au-Au > Au-CNT > CNT-CNT on the application of force. Also the contact pressure of Au/CNT-Au/CNT < Au-Au < Au-CNT < CNT-CNT. Results indicate that Au/CNT-Au/CNT contact surface performs better for electrical contact applications. When force ranges from 36 mu N to 65 mu N applied on Au/CNT-Au/CNT composite electrical pair, contact length changes from 115.06 nm to 154.61 nm. Also the contact pressures of 1.99 GN/m(2) -02.68 GN/m(2) and indentation depth of 8.14 nm-12.05 nm are observed. These results would be useful in the design of electrical contacts, RF ohmic contacts, nanoelectromechanical system relays, microelectromechanical system switches, nanomanufacturing, and material characterization.