Modeling and Experimental Investigations of Nanostructured Ag Thin Films Produced by Oblique-Angle Deposition and Its SERS Performance

被引：3

作者：

Hui, Datai ^{[1
]}

Zhou, Shun ^{[1
]}

Cai, Changlong ^{[1
]}

Song, Shigeng ^{[2
]}

Wu, Zhentao ^{[2
]}

Song, Jian ^{[2
]}

Zhang, Da ^{[1
]}

Meng, Xiao ^{[1
]}

Lu, Bo ^{[2
]}

Duan, Yingbu ^{[1
]}

Tursun, Hayrigul ^{[3
]}

Gibson, Des ^{[2
]}

机构：

[1] Xian Technol Univ, Sch Optoelect Engn, Xian 710021, Peoples R China

[2] Univ West Scotland, Sch Comp Engn & Phys Sci, Inst Thin Film Sensors & Imaging, Paisley G72 0LH, Renfrew, Scotland

[3] Shaanxi Normal Univ, Sch Phys & Informat Technol, Xian 710062, Peoples R China

来源：

COATINGS | 2021年 / 11卷 / 04期

关键词：

Kinetic Monte Carlo simulation; Oblique-Angle Deposition; silver thin film; nanocolumnar structure; SERS; ENHANCED RAMAN-SPECTROSCOPY; NANOROD ARRAYS; SILVER; TEMPERATURE; MORPHOLOGY; GROWTH;

D O I：

10.3390/coatings11040458

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The growth mechanism of nanocolumnar silver thin film deposited on a smooth silicon substrate using electron beam evaporation process at an oblique angle was simulated with the Kinetic Monte Carlo method. Following the simulated silver nanostructured thin film, a further computational simulation was done using COMSOL for surface-enhanced Raman scattering effects. The simulation results were compared against corresponding experimental results, which demonstrated high agreement between simulation results and experimental data. It was found that as the incident deposition angle increased, the density of the Ag thin film significantly decreased and the surface roughness increased. When the incident deposition angle was at 75 degrees and 85 degrees, the resulting nanocolumnar structure was significantly tilted. For Ag thin films deposited at all investigated angles, surface-enhanced Raman scattering effects were observed. Particularly, the Ag nanocolumns deposited at 85 degrees showed remarkable Surface-enhanced Raman Scattering effects. This was seen in both COMSOL simulations and experimental results: Enhancement factors were 2 x 10(7) in COMSOL simulation and 3.3 x 10(5) in the experiment.

引用

页数：15

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