Growth of cubic III-nitride semiconductors for electronics and optoelectronics application

被引:23
作者
Yoshida, S [1 ]
机构
[1] Saitama Univ, Fac Engn, Urawa, Saitama 3388570, Japan
关键词
III-nitride semiconductors; gas source MBE; surface phase diagram; surfactant effect;
D O I
10.1016/S1386-9477(00)00086-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
III-nitrides with cubic zincblende crystal structure (c-nitrides) have been successfully obtained recently, and their physical properties have been reported. However, still, the differences in the properties from those of hexagonal wurtzite structure (h-nitrides) have not been made clear, mainly because of the poor crystalline quality of c-nitrides obtained. Many theoretical works have predicted superior physical properties of c-nitrides, which are good for their device application, compared with h-nitrides. The growth control and characterization of c-nitrides are studied, and the prospect of their application for electronics and optoelectronics is discussed. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:907 / 914
页数:8
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