Effect of magnetic field on double layer in argon helicon plasma

被引:1
作者
Yang, Kaiyi [1 ]
Cui, Ruilin [1 ]
Zhu, Wanying [1 ]
Wu, Zhiwen [2 ]
Ouyang, Jiting [1 ]
机构
[1] Beijing Inst Technol, Sch Phys, Beijing 100081, Peoples R China
[2] Beijing Inst Technol, Sch Aerosp Engn, Beijing, Peoples R China
基金
中国国家自然科学基金;
关键词
Argon - Helicons - Magnetoplasma - Electron temperature - Optical emission spectroscopy - Plasma density;
D O I
10.1049/hve2.12018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The electric double layer in argon helicon plasma by using floating electrostatic probe and local optical emission spectroscopy under different external magnetic field was investigated. Results show that electrons generated in the plasma source can be magnetized by the magnetic field and transported by the gradient of diverging magnetic field in the diffusion chamber, giving rise to the hollowed distribution of electron temperature. The electron temperature on axis has a sudden decrease, leading to the sudden decrease of plasma density as well as the plasma potential, forming a double layer structure. The position of double layer moves along with the position of diverging magnetic field, and the potential drop increases along with the strength of magnetic field. The structure of the external magnetic field plays the decisive factor for the double layer in helicon plasma.
引用
收藏
页码:358 / 365
页数:8
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