Gallium nitride (GaN);
metal-insulator-semiconductor field-effect transistor (MISFET);
two-dimensional electron gas (2DEG);
surface traps;
SURFACE-STATES;
D O I:
10.1109/LED.2013.2290471
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
As an important step in understanding trap-related mechanisms in AlGaN/GaN transistors, the physical properties of surface states have been analyzed through the study of the transfer characteristics of a MISFET. This letter focused initially on the relationship between donor parameters (concentration and energy level) and electron density in the channel in AlGaN/GaN heterostructures. This analysis was then correlated to dc and pulsed measurements of the transfer characteristics of a MISFET, where the gate bias was found to modulate either the channel density or the donor states. Traps-free and traps-frozen TCAD simulations were performed on an equivalent device to capture the donor behavior. A donor concentration of 1.14 x 10(13) cm(-2) with an energy level located 0.2 eV below the conduction band edge gave the best fit to measurements. With the approach described here, we were able to analyze the region of the MISFET that corresponds to the drift region of a conventional HEMT.
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Heikman, S
Keller, S
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Keller, S
Wu, Y
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Wu, Y
Speck, JS
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Speck, JS
DenBaars, SP
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
DenBaars, SP
Mishra, UK
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Japan Sci & Technol Agcy, PRESTO, Chiyoda Ku, Tokyo 1020075, JapanUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Higashiwaki, Masataka
Chowdhury, Srabanti
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Chowdhury, Srabanti
Miao, Mao-Sheng
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Miao, Mao-Sheng
Swenson, Brian L.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Swenson, Brian L.
Van de Walle, Chris G.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Van de Walle, Chris G.
Mishra, Umesh K.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Ibbetson, JP
Fini, PT
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Fini, PT
Ness, KD
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Ness, KD
DenBaars, SP
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
DenBaars, SP
Speck, JS
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Speck, JS
Mishra, UK
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Heikman, S
Keller, S
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Keller, S
Wu, Y
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Wu, Y
Speck, JS
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Speck, JS
DenBaars, SP
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
DenBaars, SP
Mishra, UK
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Japan Sci & Technol Agcy, PRESTO, Chiyoda Ku, Tokyo 1020075, JapanUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Higashiwaki, Masataka
Chowdhury, Srabanti
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Chowdhury, Srabanti
Miao, Mao-Sheng
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Miao, Mao-Sheng
Swenson, Brian L.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Swenson, Brian L.
Van de Walle, Chris G.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Van de Walle, Chris G.
Mishra, Umesh K.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Ibbetson, JP
Fini, PT
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Fini, PT
Ness, KD
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Ness, KD
DenBaars, SP
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
DenBaars, SP
Speck, JS
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Speck, JS
Mishra, UK
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA