Tribological Property of ta-CNx:Ta Deposited via Ion Beam Assisted-Filtered Arc Deposition

被引：16
作者：
Tokoroyama, T. [1 ]
Tagami, Y. [1 ]
Murashima, M. [1 ]
Lee, W-Y [1 ,3 ]
Umehara, N. [1 ]
Kousaka, H. [2 ]
机构：
[1] Nagoya Univ, Grad Sch Engn, Dept Micronano Mech Sci & Engn, Chikusa Ku, Furo Cho, Nagoya, Aichi 4648603, Japan
[2] Gifu Univ, Grad Sch Nat Sci & Technol, 1-1 anagito, Gifu 5011193, Japan
[3] Korea Photon Technol Inst, Intelligent Opt Module Res Ctr, Gwangju 61007, South Korea
来源：
TRIBOLOGY INTERNATIONAL | 2022年 / 168卷
基金：
日本学术振兴会;
关键词：
Tantalum doped DLC; CNx; Low friction; Anti-oxidation; CARBON-FILMS; WEAR PROPERTIES; C COATINGS; DIAMOND; FRICTION; PERFORMANCE; XPS; TEMPERATURE; BEHAVIORS; OXYGEN;
D O I：
10.1016/j.triboint.2022.107450
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Improving the hardness of amorphous carbon nitride with tantalum was realized by using ion beam assisted filtered arc deposition to obtain a low friction coefficient and low specific wear rate in ambient air. The coatings were prepared with different nitrogen flow during coating at different discharge cycles of tantalum. The wear scar and as-deposited surfaces were observed and analyzed by means of FESEM, AES, XPS, and Raman analysis. The lowest friction coefficient (similar to 0.07) was obtained for ta-C:Ta200, which exhibited a low specific wear rate of < 1.0 x 10(-7) mm(3)/Nm. The XPS analysis revealed the existence of amorphous Ta2O5, and the friction coefficient seemed to be positively correlated with oxygen desorption from the coatings.
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页数：12
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