Stable and reliable Q-factor in resonant MEMS with getter film

被引：11

作者：

Longoni, G. ^{[1
]}

Conte, A. ^{[1
]}

Moraja, M. ^{[1
]}

Fourrier, A. ^{[1
]}

机构：

[1] SAES Getters SpA, Viale Italia 77, I-20020 Lainate, Italy

来源：

2006 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 44TH ANNUAL | 2006年

关键词：

getter; MEMS; Q-factor; vacuum packaging; vacuum bonding;

D O I：

10.1109/RELPHY.2006.251254

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The objective of this work was to show that the Q-factor of MEMS resonators can be increased and stabilized with the use of getters.

引用

页码：416 / +

页数：3

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[3]

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[7]

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[8]

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[10]

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