Current Understanding of Bias-Temperature Instabilities in GaN MIS Transistors for Power Switching Applications

被引:15
作者
Tapajna, Milan [1 ]
机构
[1] Slovak Acad Sci, Inst Elect Engn, Dubravska Cesta 9, Bratislava 84104, Slovakia
关键词
GaN transistors; MIS; MOS; MISHEMT; MISFET; PBTI; NBTI; threshold voltage instability; interface traps; oxide traps; THRESHOLD-VOLTAGE INSTABILITY; V-TH STABILITY; ALGAN/GAN HEMTS; SURFACE PASSIVATION; AL2O3/GAN MOSFET; HIGH-PERFORMANCE; GATE-BIAS; R-ON; SEMICONDUCTOR; RELIABILITY;
D O I
10.3390/cryst10121153
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaN-based high-electron mobility transistors (HEMTs) have brought unprecedented performance in terms of power, frequency, and efficiency. Application of metal-insulator-semiconductor (MIS) gate structure has enabled further development of these devices by improving the gate leakage characteristics, gate controllability, and stability, and offered several approaches to achieve E-mode operation desired for switching devices. Yet, bias-temperature instabilities (BTI) in GaN MIS transistors represent one of the major concerns. This paper reviews BTI in D- and E-mode GaN MISHEMTs and fully recess-gate E-mode devices (MISFETs). Special attention is given to discussion of existing models describing the defects distribution in the GaN-based MIS gate structures as well as related trapping mechanisms responsible for threshold voltage instabilities. Selected technological approaches for improving the dielectric/III-N interfaces and techniques for BTI investigation in GaN MISHEMTs and MISFETs are also outlined.
引用
收藏
页码:1 / 28
页数:28
相关论文
共 131 条
[81]   Origin of positive fixed charge at insulator/AlGaN interfaces and its control by AlGaN composition [J].
Matys, M. ;
Stoklas, R. ;
Blaho, M. ;
Adamowicz, B. .
APPLIED PHYSICS LETTERS, 2017, 110 (24)
[82]   Characterization of capture cross sections of interface states in dielectric/III-nitride heterojunction structures [J].
Matys, M. ;
Stoklas, R. ;
Kuzmik, J. ;
Adamowicz, B. ;
Yatabe, Z. ;
Hashizume, T. .
JOURNAL OF APPLIED PHYSICS, 2016, 119 (20)
[83]   Positive and negative threshold voltage instabilities in GaN-based transistors [J].
Meneghesso, G. ;
Meneghini, M. ;
De Santi, C. ;
Ruzzarin, M. ;
Zanoni, E. .
MICROELECTRONICS RELIABILITY, 2018, 80 :257-265
[84]   Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate [J].
Meneghesso, Gaudenzio ;
Meneghini, Matteo ;
Bisi, Davide ;
Rossetto, Isabella ;
Wu, Tian-Li ;
Van Hove, Marleen ;
Marcon, Denis ;
Stoffels, Steve ;
Decoutere, Stefaan ;
Zanoni, Enrico .
MICROELECTRONICS RELIABILITY, 2016, 58 :151-157
[85]   Negative Bias-Induced Threshold Voltage Instability in GaN-on-Si Power HEMTs [J].
Meneghini, Matteo ;
Rossetto, Isabella ;
Bisi, Davide ;
Ruzzarin, Maria ;
Van Hove, Marleen ;
Stoffels, Steve ;
Wu, Tian-Li ;
Marcon, Denis ;
Decoutere, Stefaan ;
Meneghesso, Gaudenzio ;
Zanoni, Enrico .
IEEE ELECTRON DEVICE LETTERS, 2016, 37 (04) :474-477
[86]   Effects of interface states and temperature on the C-V behavior of metal/insulator/AlGaN/GaN heterostructure capacitors [J].
Miczek, Marcin ;
Mizue, Chihoko ;
Hashizume, Tamotsu ;
Adamowicz, Boguslawa .
JOURNAL OF APPLIED PHYSICS, 2008, 103 (10)
[87]   AlGaN/GaN HEMTs - An overview of device operation and applications [J].
Mishra, UK ;
Parikh, P ;
Wu, YF .
PROCEEDINGS OF THE IEEE, 2002, 90 (06) :1022-1031
[88]  
Moens P, 2014, PROC INT SYMP POWER, P374, DOI 10.1109/ISPSD.2014.6856054
[89]   Review of bias-temperature instabilities at the III-N/dielectric interface [J].
Ostermaier, C. ;
Lagger, P. ;
Reiner, M. ;
Pogany, D. .
MICROELECTRONICS RELIABILITY, 2018, 82 :62-83
[90]   Dynamics of carrier transport via AlGaN barrier in AlGaN/GaN MIS-HEMTs [J].
Ostermaier, C. ;
Lagger, P. ;
Prechtl, G. ;
Grill, A. ;
Grasser, T. ;
Pogany, D. .
APPLIED PHYSICS LETTERS, 2017, 110 (17)