Current Understanding of Bias-Temperature Instabilities in GaN MIS Transistors for Power Switching Applications

被引:15
|
作者
Tapajna, Milan [1 ]
机构
[1] Slovak Acad Sci, Inst Elect Engn, Dubravska Cesta 9, Bratislava 84104, Slovakia
关键词
GaN transistors; MIS; MOS; MISHEMT; MISFET; PBTI; NBTI; threshold voltage instability; interface traps; oxide traps; THRESHOLD-VOLTAGE INSTABILITY; V-TH STABILITY; ALGAN/GAN HEMTS; SURFACE PASSIVATION; AL2O3/GAN MOSFET; HIGH-PERFORMANCE; GATE-BIAS; R-ON; SEMICONDUCTOR; RELIABILITY;
D O I
10.3390/cryst10121153
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaN-based high-electron mobility transistors (HEMTs) have brought unprecedented performance in terms of power, frequency, and efficiency. Application of metal-insulator-semiconductor (MIS) gate structure has enabled further development of these devices by improving the gate leakage characteristics, gate controllability, and stability, and offered several approaches to achieve E-mode operation desired for switching devices. Yet, bias-temperature instabilities (BTI) in GaN MIS transistors represent one of the major concerns. This paper reviews BTI in D- and E-mode GaN MISHEMTs and fully recess-gate E-mode devices (MISFETs). Special attention is given to discussion of existing models describing the defects distribution in the GaN-based MIS gate structures as well as related trapping mechanisms responsible for threshold voltage instabilities. Selected technological approaches for improving the dielectric/III-N interfaces and techniques for BTI investigation in GaN MISHEMTs and MISFETs are also outlined.
引用
收藏
页码:1 / 28
页数:28
相关论文
共 50 条
  • [1] Bias-temperature instabilities and radiation effects in MOS devices
    Zhou, XJ
    Fleetwood, DM
    Felix, JA
    Gusev, EP
    D'Emic, C
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2005, 52 (06) : 2231 - 2238
  • [2] Bias-Temperature Instabilities and Radiation Effects on SiC MOSFETs
    Zhang, E. X.
    Zhang, C. X.
    Fleetwood, D. M.
    Schrimpf, R. D.
    Dhar, S.
    Ryu, S. -H.
    Shen, X.
    Pantelides, Sokrates T.
    SILICON NITRIDE, SILICON DIOXIDE, AND EMERGING DIELECTRICS 11, 2011, 35 (04): : 369 - 380
  • [3] Border traps and bias-temperature instabilities in MOS devices
    Fleetwood, D. M.
    MICROELECTRONICS RELIABILITY, 2018, 80 : 266 - 277
  • [4] GaN Power Transistors on Si Substrates for Switching Applications
    Ikeda, Nariaki
    Niiyama, Yuki
    Kambayashi, Hiroshi
    Sato, Yoshihiro
    Nomura, Takehiko
    Kato, Sadahiro
    Yoshida, Seikoh
    PROCEEDINGS OF THE IEEE, 2010, 98 (07) : 1151 - 1161
  • [5] GaN Transistors for Power Switching and High Frequency Applications
    Tsurumi, Naohiro
    Uemoto, Yasuhiro
    Sakai, Hiroyuki
    Ueda, Tetsuzo
    Tanaka, Tsuyoshi
    Ueda, Daisuke
    2008 IEEE CSIC SYMPOSIUM, 2008, : 202 - 206
  • [6] Switching assessment of GaN transistors for power conversion applications
    Das, J.
    Marcon, D.
    Van Hove, M.
    Derluyn, J.
    Germain, M.
    Borghs, G.
    EPE: 2009 13TH EUROPEAN CONFERENCE ON POWER ELECTRONICS AND APPLICATIONS, VOLS 1-9, 2009, : 4611 - 4616
  • [7] Review of bias-temperature instabilities at the III-N/dielectric interface
    Ostermaier, C.
    Lagger, P.
    Reiner, M.
    Pogany, D.
    MICROELECTRONICS RELIABILITY, 2018, 82 : 62 - 83
  • [8] Normally-off GaN Transistors for Power Switching Applications
    Hilt, O.
    Bahat-Treidel, E.
    Brunner, F.
    Knauer, A.
    Zhytnytska, R.
    Kotara, P.
    Wuerfl, J.
    GALLIUM NITRIDE AND SILICON CARBIDE POWER TECHNOLOGIES 3, 2013, 58 (04): : 145 - 154
  • [9] Bias-temperature instabilities of polysilicon gate HfO2 MOSFETs
    Onishi, K
    Choi, RN
    Kang, CS
    Cho, HJ
    Kim, YH
    Nieh, RE
    Han, J
    Krishnan, SA
    Akbar, MS
    Lee, JC
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (06) : 1517 - 1524
  • [10] GaN-based Gate Injection Transistors for Power Switching Applications
    Ueda, Tetsuzo
    Handa, Hiroyuki
    Kinoshita, Yusuke
    Umeda, Hidekazu
    Ujita, Shinji
    Kajitani, Ryo
    Ogawa, Masahiro
    Tanaka, Kenichiro
    Morita, Tatsuo
    Tamura, Satoshi
    Ishida, Hidetoshi
    Ishida, Masahiro
    2014 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2014,