Current Understanding of Bias-Temperature Instabilities in GaN MIS Transistors for Power Switching Applications

被引:15
作者
Tapajna, Milan [1 ]
机构
[1] Slovak Acad Sci, Inst Elect Engn, Dubravska Cesta 9, Bratislava 84104, Slovakia
关键词
GaN transistors; MIS; MOS; MISHEMT; MISFET; PBTI; NBTI; threshold voltage instability; interface traps; oxide traps; THRESHOLD-VOLTAGE INSTABILITY; V-TH STABILITY; ALGAN/GAN HEMTS; SURFACE PASSIVATION; AL2O3/GAN MOSFET; HIGH-PERFORMANCE; GATE-BIAS; R-ON; SEMICONDUCTOR; RELIABILITY;
D O I
10.3390/cryst10121153
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaN-based high-electron mobility transistors (HEMTs) have brought unprecedented performance in terms of power, frequency, and efficiency. Application of metal-insulator-semiconductor (MIS) gate structure has enabled further development of these devices by improving the gate leakage characteristics, gate controllability, and stability, and offered several approaches to achieve E-mode operation desired for switching devices. Yet, bias-temperature instabilities (BTI) in GaN MIS transistors represent one of the major concerns. This paper reviews BTI in D- and E-mode GaN MISHEMTs and fully recess-gate E-mode devices (MISFETs). Special attention is given to discussion of existing models describing the defects distribution in the GaN-based MIS gate structures as well as related trapping mechanisms responsible for threshold voltage instabilities. Selected technological approaches for improving the dielectric/III-N interfaces and techniques for BTI investigation in GaN MISHEMTs and MISFETs are also outlined.
引用
收藏
页码:1 / 28
页数:28
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