The Legnaro ion microprobe in low current experiments

被引:5
作者
Cervellera, F
Donolato, C
Egeni, GP
Fortuna, G
Nipoti, R
Polesello, P
Rossi, P
Rudello, V
Vittone, E
Viviani, M
机构
[1] UNIV PADUA,DIPARTIMENTO FIS,PADUA,ITALY
[2] IST NAZL FIS NUCL,PADUA,ITALY
[3] UNIV TURIN,DIPARTIMENTO FIS SPERIMENTALE,TURIN,ITALY
[4] IST NAZL FIS NUCL,I-10125 TURIN,ITALY
[5] CNR,IST LAMEL,I-40129 BOLOGNA,ITALY
[6] IST NAZL FIS NUCL,LAB NAZL LEGNARO,I-35020 LEGNARO,PD,ITALY
关键词
D O I
10.1016/S0168-583X(97)00200-0
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The focused ion microprobe of the Laboratori Nazionali di Legnaro has been recently employed in experiments requiring very low beam current. This article will discuss the performance of our apparatus in this application, the drawbacks which showed up and the appropriate solutions. We present IBIC observations of grain boundaries in polycrystalline silicon solar cells and IBIC and IBIL measurements on CVD diamond samples. The modifications introduced in the experimental setup are outlined. We emphasise the problems typical of these measurements and propose the interposition of thin gold foils in the beam line, as a way to handle very different current intensities. We study the effects of these foils on beam quality and their effectiveness in reducing the current. A new designed system for easy interchange of foils and related collimators is described, which will be inserted upstream in the beam line.
引用
收藏
页码:25 / 30
页数:6
相关论文
共 15 条
  • [1] ION-BEAM-INDUCED LUMINESCENCE FROM DIAMOND AND OTHER CRYSTALS FROM A NUCLEAR MICROBEAM
    BETTIOL, AA
    JAMIESON, DN
    PRAWER, S
    ALLEN, MG
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4) : 775 - 779
  • [2] The LNL proton microprobe: Original technical solutions and new developments
    Boccaccio, P
    Bollini, D
    Ceccato, D
    Egeni, GP
    Rossi, P
    Rudello, V
    Viviani, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 109 : 94 - 98
  • [3] THE MICROBEAM FACILITY OF THE AN-2000 ACCELERATOR OF THE LABORATORI-NAZIONALI-DI-LEGNARO
    BOLLINI, D
    CERVELLERA, F
    EGENI, GP
    MAZZOLDI, P
    MOSCHINI, G
    ROSSI, P
    RUDELLO, V
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1993, 328 (1-2) : 173 - 176
  • [4] DISLOCATION IMAGING USING ION-BEAM-INDUCED CHARGE
    BREESE, MBH
    KING, PJC
    GRIME, GW
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (25) : 3309 - 3311
  • [5] MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE
    BREESE, MBH
    KING, PJC
    GRIME, GW
    WATT, F
    [J]. JOURNAL OF APPLIED PHYSICS, 1992, 72 (06) : 2097 - 2104
  • [6] OPTIMIZATION OF ION-BEAM-INDUCED CHARGE MICROSCOPY FOR THE ANALYSIS OF INTEGRATED-CIRCUITS
    BREESE, MBH
    SAINT, A
    SEXTON, FW
    HOM, KM
    SCHONE, H
    DOYLE, BL
    LAIRD, JS
    LEGGE, GJF
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (08) : 3734 - 3741
  • [7] A COMPARISON BETWEEN MEV PROTONS AND ALPHA-PARTICLES FOR IBIC ANALYSIS
    BREESE, MBH
    SOW, CH
    JAMIESON, DN
    WATT, F
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4) : 790 - 793
  • [8] DONOLATO C, 1997, IN PRESS MAT SCI E B
  • [9] Field J.E., 1979, PROPERTIES DIAMOND
  • [10] GRIME GW, 1987, PRINCIPLES APPL HIGH, pCH3