MIM Structure With Inverted M-Type Cavity for Sensing Applications

被引：18
作者：
Yan, Shubin [1 ,2 ]
Yang, Xiaoyu [1 ,3 ]
Xu, Daijing [1 ,3 ]
Su, Hao [1 ,3 ]
Wu, Xiushan [1 ,2 ]
Hua, Ertian [1 ,2 ]
机构：
[1] Zhejiang Univ Water Resources & Elect Power, Sch Elect Engn, Hangzhou 310018, Peoples R China
[2] Zhejiang Belarus Joint Lab Intelligent Equipment, Hangzhou 310018, Peoples R China
[3] North Univ China, Sch Instrument & Elect, Taiyuan 030051, Peoples R China
来源：
IEEE SENSORS JOURNAL | 2021年 / 21卷 / 06期
基金：
中国国家自然科学基金;
关键词：
Sensors; Sensitivity; Optical waveguides; Load flow; Rectangular waveguides; Interference; Temperature sensors; Metal-insulator-metal; inverted M-type cavity; Fano resonance; multifunctional sensor; TUNABLE FANO RESONANCE; PLASMONICALLY INDUCED TRANSPARENCY; STUB WAVE-GUIDE; RESONATORS; ABSORPTION; LIGHT; MODE;
D O I：
10.1109/JSEN.2020.3044901
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Herein, a high-sensitivity multifunctional nanosensor comprising a metal-insulator-metal (MIM) waveguide and an inverted M-type cavity (IMTC) is presented. Fano resonances are generated owing to the interactions between different light pathways. Two contrastive structures are proposed to illustrate that a proper interference area leads to better propagation characteristics. The influence of geometric parameters on sensing properties is studied. Four derived structures are investigated to discuss the main factor for improving sensitivity. The designed structure can detect temperature and NaCl solution concentration with sensitivities reaching 1.444 nm/ and 6.6 nm/, respectively. The designed structures can also potentially be applied to other nanoscale devices.
引用
收藏
页码：7468 / 7477
页数：10
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