MEMS based vacuum packaging method of optically readable infrared focal plane array

被引：1

作者：

Feng, Fei ^{[1
]}

Zhang, Yunsheng ^{[1
]}

Luo, Fan ^{[1
]}

Wei, Xudong ^{[1
]}

Ge, Xiaohong ^{[1
]}

Wang, Yuelin ^{[1
]}

Li, Xinxin ^{[1
]}

机构：

[1] Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2017年 / 23卷 / 06期

基金：

中国国家自然科学基金; 国家高技术研究发展计划(863计划);

关键词：

Infrared Image; Micrometer Scale; Optical Window; Vacuum Packaging; Infrared Signal;

D O I：

10.1007/s00542-016-3036-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MEMS based vacuum packaging method is developed for uncooled optically readable infrared focal plane array (OR-IRFPA). The vacuum packaging structure is made up of three layers: a glass visible window, a silicon spacer, and a silicon infrared window. The silicon spacer is bonded with the glass visible window to form two cavities: one cavity for getter and another one for OR-IRFPA. The isolation wall with micrometer scale pores is designed to ensure air's free flow between two cavities and prevent getter powder from harming pixels of OR-IRFPA. The infrared window is used as cover board and selectively transmitting 8-14 mu m infrared radiation. Infrared images of human body are gotten by using the vacuum packaged OR-IRFPA, which shows the vacuum packaging method is feasible and useful for OR-IRFPA.

引用

页码：1793 / 1798

页数：6

共 11 条

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