How big is a small Langmuir probe?

被引:104
作者
Sheridan, TE [1 ]
机构
[1] Australian Natl Univ, Plasma Res Lab, Canberra, ACT 0200, Australia
关键词
D O I
10.1063/1.874162
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The area of the sheath around a thin, disk-shaped electrode that is biased below the plasma potential has been computed using a hybrid simulation with cold, collisionless ions and Boltzmann electrons. That is, the "collecting area" of a double-sided, planar Langmuir probe has been determined for the ion saturation current regime. Sheath areas are calculated for probe radii from 10 to 45 electron Debye lengths and for probe biases from -5 to -30 times the electron temperature. The dependence of the sheath area on probe radius and bias is parameterized using simple empirical formulas. (C) 2000 American Institute of Physics. [S1070-664X(00)04807-2].
引用
收藏
页码:3084 / 3088
页数:5
相关论文
共 15 条
[1]  
Chen F. F., 1965, PLASMA DIAGNOSTIC TE, P143
[2]   TEMPORAL EVOLUTION OF COLLISIONLESS SHEATHS [J].
CHO, MH ;
HERSHKOWITZ, N ;
INTRATOR, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (05) :2978-2986
[3]   CHARACTERISTICS OF A CYLINDRICAL LANGMUIR PROBE OF FINITE LENGTH [J].
JAEGER, EF ;
BERRY, LA ;
BATCHELOR, DB .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (10) :6918-6922
[4]   EDGE EFFECT CORRECTION FOR SMALL PLANAR LANGMUIR PROBES [J].
JOHNSON, JD ;
HOLMES, AJT .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (10) :2628-2637
[5]  
Laframboise J. G., 1966, Theory of spherical and cylindrical Langmuir probes in a collisionless, Maxwellian plasma at rest
[6]   UNIFIED THEORY FOR LANGMUIR PROBE IN A COLLISIONLESS PLASMA [J].
LAM, SH .
PHYSICS OF FLUIDS, 1965, 8 (01) :73-&
[7]   SHAPE OF CATHODE DARK SPACE OF A SPUTTERING PLASMA DETERMINED FROM PROBE MEASUREMENTS [J].
LARSEN, WR ;
WILMSEN, CW ;
CHAN, PW .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) :2153-2156
[8]   Sheath dynamics and dose analysis for planar targets in plasma source ion implantation [J].
Malik, S.M. ;
Fetherston, R.P. ;
Sridharan, K. ;
Conrad, J.R. .
Plasma Sources Science and Technology, 1993, 2 (02)
[9]   THEORY OF CYLINDRICAL AND SPHERICAL LANGMUIR PROBES IN THE LIMIT OF VANISHING DEBYE NUMBER [J].
PARROT, MJM ;
STOREY, LRO ;
PARKER, LW ;
LAFRAMBOISE, JG .
PHYSICS OF FLUIDS, 1982, 25 (12) :2388-2400
[10]   Kinetic model for plasma-based ion implantation of a short, cylindrical tube with auxiliary electrode [J].
Sheridan, TE ;
Kwok, TK ;
Chu, PK .
APPLIED PHYSICS LETTERS, 1998, 72 (15) :1826-1828