Non-contact surface roughness measurement with a light-field camera

被引：0
作者：
Igarashi, Yoshitaka [1 ]
Mitsunari, Toshiyasu [1 ]
Yamazaki, Kazunori [1 ]
机构：
[1] Sumitomo Heavy Ind Ltd, Prod Engn Ctr, 19 Natsushima Cho, Yokosuka, Kanagawa 2378555, Japan
来源：
OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IX | 2022年 / 12319卷
关键词：
Generalized Harvey-Shack; K-Correlation; Surface Roughness; Optical Scatter; Light-Field; SCATTERING;
D O I：
10.1117/12.2642062
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new non-contact surface roughness measurement technology has been developed. This is a technique that helps ensure the traceability of each component in the manufacturing process. Specifically, the surface roughness parameters Sq and S Delta q were measured and evaluated using scattered light simulation and a light-field camera. The roughness parameter Sq was determined using the generalized Harvey-Shack scattering theory and showed good agreement with existing machines. Furthermore, the roughness parameter S Delta q was estimated from the argument "a" extracted from the K-correlation model.
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页数：7
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