Near-field solid immersion lens microscope with advanced compact mechanical design

被引:8
作者
Chen, Tao [1 ]
Milster, Tom
Park, Sang-Ki
McCarthy, Brendan
Sarid, Dror
Poweleit, Christian
Menendez, Jose
机构
[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA
[2] Arizona State Univ, Dept Phys & Astron, Tempe, AZ 85287 USA
基金
美国国家科学基金会;
关键词
near field; solid immersion lens; microscopy; optical data storage;
D O I
10.1117/1.2361276
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs is around 200 nm with an effective numerical aperture of 1.5. Imaging with the SIL is compared with an atomic force microscopy scan. (c) 2006 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页数:6
相关论文
共 8 条
[1]   Gap servo system for a biaxial device using an optical gap signal in a near field readout system [J].
Ishimoto, T ;
Saito, K ;
Shinoda, M ;
Kondo, T ;
Nakaoki, A ;
Yamamoto, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (5A) :2719-2724
[2]  
Kishima K, 1999, P SOC PHOTO-OPT INS, V3864, P355
[3]   SOLID IMMERSION MICROSCOPE [J].
MANSFIELD, SM ;
KINO, GS .
APPLIED PHYSICS LETTERS, 1990, 57 (24) :2615-2616
[4]   Near-field optical data storage: avenues for improved performance [J].
Milster, TD .
OPTICAL ENGINEERING, 2001, 40 (10) :2255-2260
[5]  
Pinta M., 1992, P SOC PHOTO-OPT INS, V1846, P10
[6]   Raman imaging of patterned silicon using a solid immersion lens [J].
Poweleit, CD ;
Gunther, A ;
Goodnick, S ;
Menendez, J .
APPLIED PHYSICS LETTERS, 1998, 73 (16) :2275-2277
[7]   Imaging with solid immersion lenses, spatial resolution, and applications [J].
Wu, Q ;
Ghislain, LP ;
Elings, VB .
PROCEEDINGS OF THE IEEE, 2000, 88 (09) :1491-1498
[8]   Scanning near-field optical spectroscopy and imaging using nanofabricated probes [J].
Zhou, H ;
Midha, A ;
Mills, G ;
Donaldson, L ;
Weaver, JMR .
APPLIED PHYSICS LETTERS, 1999, 75 (13) :1824-1826