Simple lateral shearing interferometer using phase shifting interferometry technique

被引:4
作者
Song, JB [1 ]
Lee, YW [1 ]
Lee, IW [1 ]
Lee, JH [1 ]
机构
[1] Korea Res Inst Stand & Sci, Photometry & Imaging Opt Grp, Taejon 305600, South Korea
来源
OPTICAL DESIGN AND TESTING | 2002年 / 4927卷
关键词
lateral shearing interferometer; phase shifting interferometry; wedge plate; lateral shear; wedge angle; incident angle; phase shifting error;
D O I
10.1117/12.464343
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In order to use phase shifting interferometry(PSI) in lateral shearing interferometer, piezoelectric transducer(PZT) is mainly used. But because PZT has many error sources and the moving distance for required phase shifting is very short, the phase shifting quantity has always considerable errors. We present a simple phase shifting technique without PZT. Moving the wedge plate parallel to the first wedge surface changes the phase difference between the original wavefront and the sheared wavefront. This method makes the shearing interferometer very simple in spite of using PSI technique. We derive the phase shifting relations originated from the moving wedge and discuss some error factors.
引用
收藏
页码:177 / 185
页数:9
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