640 x 486 long-wavelength two-color GaAs/AlGaAs quantum well infrared photodetector (QWIP) focal plane array camera

被引:114
作者
Gunapala, SD [1 ]
Bandara, SV
Singh, A
Liu, JK
Rafol, SB
Luong, EM
Mumolo, JM
Tran, NQ
Ting, DZY
Vincent, JD
Shott, CA
Long, J
LeVan, PD
机构
[1] CALTECH, Jet Prop Lab, Ctr Space Microelect Technol, Pasadena, CA 91109 USA
[2] Raytheon Infrared Ctr Excellence, Goleta, CA 93117 USA
[3] USAF, Res Lab, Kirtland AFB, NM 87117 USA
关键词
dualband infrared; focal plane arrays; gallium arsenide; large format imaging arrays; long-wavelength infrared; quantum well infrared photodetectors; target discrimination;
D O I
10.1109/16.841227
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have designed and fabricated an optimized long-wavelength/very-long-wavelength two-color quantum well infrared photodetector (QWIP) device structure. The device structure was grown on a 3-in semi-insulating GaAs substrate by molecular beam epitaxy (MBE), The wafer was processed into several 640 x 486 format monolithically integrated 8-9 and 14-15 mu m two-color (or dual wavelength) QWIP focal plane arrays (FPA's), These FPA's were then hybridized to 640 x 486 silicon CMOS readout multiplexers. A thinned (i.e,, substrate removed) FPA hybrid was integrated into a liquid helium cooled dewar for electrical and optical characterization and to demonstrate simultaneous two-color imagery. The 8-9 mu m detectors in the FPA have shown background limited performance (BLIP) at 70 K operating temperature for 300 K background with f/2 cold stop. The 14-15 mu m detectors of the FPA reaches BLIP at 40 K operating temperature under the same background conditions. In this paper we discuss the performance of this long-wavelength dualband QWIP FPA in terms of quantum efficiency, detectivity, noise equivalent temperature difference (NE Delta T), uniformity, and operability.
引用
收藏
页码:963 / 971
页数:9
相关论文
共 17 条
[1]   QUANTUM EFFICIENCY ENHANCEMENT OF ALGAAS/GAAS QUANTUM-WELL INFRARED DETECTORS USING A WAVE-GUIDE WITH A GRATING COUPLER [J].
ANDERSSON, JY ;
LUNDQVIST, L ;
PASKA, ZF .
APPLIED PHYSICS LETTERS, 1991, 58 (20) :2264-2266
[2]   320 x 240 pixels quantum well infrared photodetector (QWIP) array for thermal imaging: Fabrication and evaluation [J].
Andersson, JY ;
Alverbro, J ;
Borglind, J ;
Helander, P ;
Martijn, H ;
Ostlund, M .
INFRARED TECHNOLOGY AND APPLICATIONS XXIII, PTS 1 AND 2, 1997, 3061 :740-748
[3]  
BECK WA, 1994, 2 INT S 2 2 MUM WAV
[4]  
BOIS P, 1995, P SOC PHOTO-OPT INS, V2552, P755, DOI 10.1117/12.218275
[5]   Corrugated QWIP array fabrication and characterization [J].
Choi, KK ;
Goldberg, AC ;
Das, NC ;
Jhabvala, MD ;
Bailey, RB ;
Vural, K .
PHOTODETECTORS: MATERIALS AND DEVICES III, 1998, 3287 :118-127
[6]  
Gunapala SD, 2000, SEMICONDUCT SEMIMET, V62, P197
[7]   Quantum well infrared photodetectors for low background applications [J].
Gunapala, SD ;
Bandara, SV ;
Singh, A ;
Liu, JK ;
Luong, EM ;
Mumolo, JM ;
McKelvey, MJ .
INFRARED DETECTORS AND FOCAL PLANE ARRAYS V, 1998, 3379 :225-234
[8]   Long-wavelength 640x484 GaAs/AlxGa1-xAs quantum well infrared photodetector focal plane array camera [J].
Gunapala, SD ;
Bandara, SV ;
Liu, JK ;
Hong, W ;
Sundaram, M ;
Carralejo, R ;
Shott, CA ;
Maker, PD ;
Miller, RE .
INFRARED TECHNOLOGY AND APPLICATIONS XXIII, PTS 1 AND 2, 1997, 3061 :722-727
[9]   9-mu m cutoff 256x256 GaAs/AlxGa1-xAs quantum well infrared photodetector hand-held camera [J].
Gunapala, SD ;
Liu, JK ;
Park, JS ;
Sundaram, M ;
Shott, CA ;
Hoelter, T ;
Lin, TL ;
Massie, ST ;
Maker, PD ;
Muller, RE ;
Sarusi, G .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1997, 44 (01) :51-57
[10]   LARGE PHOTOCONDUCTIVE GAIN IN QUANTUM-WELL INFRARED PHOTODETECTORS [J].
HASNAIN, G ;
LEVINE, BF ;
GUNAPALA, S ;
CHAND, N .
APPLIED PHYSICS LETTERS, 1990, 57 (06) :608-610