[1] KTH Royal Inst Technol, Microsyst Technol Lab, SE-10044 Stockholm, Sweden
[2] Multitel Asbl, B-7000 Mons, Belgium
[3] Univ Politecn Valencia, Dept Quim, Valencia 46022, Spain
[4] Zeptosens, CH-4108 Witterswil, Switzerland
[5] Univ Paris 11, Inst Elect Fondamentale, F-91405 Orsay, France
[6] Univ Politecn Madrid, Inst Sistemas Optoelect & Microtecnol, E-28040 Madrid, Spain