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- [22] High quality surface micromachining of LiNbO3 by ion implantation-assisted etching MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XVIII, 2013, 8612
- [29] Optical ridge waveguides preserving the thermo-optic features in LiNbO3 crystals fabricated by combination of proton implantation and selective wet etching OPTICS EXPRESS, 2010, 18 (11): : 11444 - 11449