The protective properties of ultra-thin diamond like carbon films for high density magnetic storage devices

被引:42
作者
Zhong, Min [1 ]
Zhang, Chenhui [1 ]
Luo, Jianbin [1 ]
Lu, Xinchun [1 ]
机构
[1] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China
关键词
Ultra-thin DLC; TEM; Wear resistance; Diffusion barrier; FCVA; TRIBOLOGICAL PROPERTIES; CORROSION PROTECTION; RAMAN-SPECTRA; DLC FILMS; COATINGS; SURFACE; DEPOSITION; LAYER;
D O I
10.1016/j.apsusc.2009.08.023
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
With the increase of magnetic storage density, the thickness of the protective diamond like carbon (DLC) film on the surfaces of head and disk is required as thin as possible. In this paper, the structure, mechanical properties and corrosion and oxidation resistance of ultra-thin DLC films are investigated. The ultra-thin DLC films were deposited by using filtered cathodic vacuum arc (FCVA) technique. The exact thickness of the ultra-thin DLC film was determined by high resolution transmission electron microscope (HRTEM). Raman analysis indicates that the ultra-thin DLC film presents ta-C structure with high sp(3) fraction. In the wear test, a diamond tip was used to simulate a single-asperity contact with the film surface and the wear marks were produced on the film surface. The wear depths decrease with film thickness increasing. If the film thickness was 1.4 nm or above, the wear depth was much lower than that of Si substrate. This indicates that the ultra-thin DLC film with thickness of 1.4 nm shows excellent wear resistance. Corrosion tests in water and oxidation tests in air were carried out to investigate the diffusion barrier effect of the ultra-thin DLC films. The results show that the DLC film with thickness of 1.4 nm provides adequate coverage on the substrate and has good corrosion and oxidation resistance. (C) 2009 Elsevier B V. All rights reserved.
引用
收藏
页码:322 / 328
页数:7
相关论文
共 36 条
[1]   Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs [J].
Anders, A ;
Fong, W ;
Kulkarni, AV ;
Ryan, FW ;
Bhatia, CS .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2001, 29 (05) :768-775
[2]   Investigations of the corrosion protection of ultrathin a-C and a-C:N overcoats for magnetic storage devices [J].
Bernhard, P ;
Ziethen, C ;
Ohr, R ;
Hilgers, H ;
Schönhense, G .
SURFACE & COATINGS TECHNOLOGY, 2004, 180 :621-626
[3]   Nanotribology, nanomechanics and nanomaterials characterization [J].
Bhushan, Bharat .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2008, 366 (1869) :1351-1381
[4]   Cathodic arc deposition of films [J].
Brown, IG .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1998, 28 :243-269
[5]   Dynamic roughening of tetrahedral amorphous carbon [J].
Casiraghi, C ;
Ferrari, AC ;
Ohr, R ;
Flewitt, AJ ;
Chu, DP ;
Robertson, J .
PHYSICAL REVIEW LETTERS, 2003, 91 (22)
[6]   Surface properties of ultra-thin tetrahedral amorphous carbon films for magnetic storage technology [J].
Casiraghi, C ;
Ferrari, AC ;
Ohr, R ;
Chu, D ;
Robertson, J .
DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) :1416-1421
[7]   Ultra-thin carbon layer for high density magnetic storage devices [J].
Casiraghi, C ;
Ferrari, AC ;
Robertson, J ;
Ohr, R ;
Gradowski, MV ;
Schneider, D ;
Hilgers, H .
DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) :1480-1485
[8]   Diamond-like carbon for data and beer storage [J].
Casiraghi, Cinzia ;
Robertson, John ;
Ferrari, Andrea C. .
MATERIALS TODAY, 2007, 10 (1-2) :44-53
[9]   Deposition and properties of tetrahedral amorphous carbon films prepared on magnetic hard disks [J].
Chan, CY ;
Lai, KH ;
Fung, MK ;
Wong, WK ;
Bello, I ;
Huang, RF ;
Lee, CS ;
Lee, ST ;
Wong, SP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (04) :1606-1610
[10]   Corrosion protection of DLC coatings on magnesium alloy [J].
Choi, J. ;
Nakao, S. ;
Kim, J. ;
Ikeyama, M. ;
Kato, T. .
DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) :1361-1364