Yield evaluation of gold sensor electrodes used for fully electronic DNA detection arrays on CMOS

被引：9

作者：

Frey, A ^{[1
]}

Hofmann, F

Peters, R

Holzapfl, B

Schienle, M

Paulus, C

Schindler-Bauer, P

Kuhlmeier, D

Krause, J

Eckstein, G

Thewes, R

机构：

[1] Infineon Technol, Corp Res, D-81730 Munich, Germany

[2] November AG, Erlangen, Germany

[3] Siemens AG, D-8000 Munich, Germany

来源：

MICROELECTRONICS RELIABILITY | 2002年 / 42卷 / 9-11期

关键词：

D O I：

10.1016/S0026-2714(02)00234-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Gold electrodes are required as sensor elements to enable a fully electronic DNA detection technique. Aiming for the integration of a gold backend module into a standard CMOS process, the yield of this extra process is evaluated. Data are presented from adequate passive test structures and from a fully processed active CMOS chip operated in a test mode. Experiments with DNA molecules applied to the chip demonstrate proper biochemical operation obtained with the considered process options. High yield is achieved. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：1801 / 1806

页数：6

共 50 条

[1] A CMOS, fully integrated sensor for electronic detection of DNA hybridization [J].

Barbaro, Massimo ;

Bonfiglio, Annalisa ;

Raffo, Luigi ;

Alessandrini, Andrea ;

Facci, Paolo ;

Barak, Imrich .

IEEE ELECTRON DEVICE LETTERS, 2006, 27 (07) :595-597

[2] CMOS sensor interface arrays for DNA detection [J].

Thewes, R ;

Frey, A ;

Schienle, M ;

Paulus, C ;

Holzapfl, B ;

Jenkner, M ;

Schindler-Bauer, P ;

Hofmann, F .

ANALOG CIRCUIT DESIGN: SENSOR AND ACTUATOR INTERFACE ELECTRONICS, INTEGRATED HIGH-VOLTAGE ELECTRONICS AND POWER MANAGEMENT, LOW-POWER AND HIGH-RESOLUTION ADC'S, 2004, :65-89

[3] Fully electronic DNA hybridization detection by a standard CMOS biochip [J].

Barbaro, Massimo ;

Bonfiglio, Annalisa ;

Raffo, Luigi ;

Alessandrini, Andrea ;

Facci, Paolo ;

Barak, Imrich .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 118 (1-2) :41-46

[4] Fully electronic DNA detection on a CMOS chip: Device and process issues [J].

Hofmann, F ;

Frey, A ;

Holzapfl, B ;

Schienle, M ;

Paulus, C ;

Schindler-Bauer, P ;

Kuhlmeier, D ;

Krause, J ;

Hintsche, R ;

Nebling, E ;

Albers, J ;

Gumbrecht, W ;

Plehnert, K ;

Eckstein, G ;

Thewes, R .

INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, 2002, :488-491

[5] A Fully Electric DNA Detection using CMOS integrated CNT network Sensor [J].

Kim, Seok Hyang ;

Woo, Jun-Myung ;

Ahn, Jinhong ;

Park, Young June .

NANOTECHNOLOGY 2012, VOL 1: ADVANCED MATERIALS, CNTS, PARTICLES, FILMS AND COMPOSITES, 2012, :326-329

[6] Electronic conduction in DNA attached to gold electrodes [J].

Bhattacharya, S ;

Choi, J ;

Lodha, S ;

Janes, DB ;

Bonilla, AF ;

Jeong, KJ ;

Lee, GU .

2003 THIRD IEEE CONFERENCE ON NANOTECHNOLOGY, VOLS ONE AND TWO, PROCEEDINGS, 2003, :79-82

[7] CMOS Thermal Sensor Arrays for Enzymatic Glucose Detection [J].

Wang, Po-Yueh ;

Lu, Michael S. -C. .

IEEE SENSORS JOURNAL, 2011, 11 (12) :3469-3475

[8] Hardware-software design of a smart sensor for fully-electronic DNA hybridization detection [J].

Stagni, C ;

Guiducci, C ;

Lanzoni, M ;

Benim, L ;

Riccò, B .

DESIGNERS' FORUM: DESIGN, AUTOMATION AND TEST IN EUROPE CONFERENCE AND EXHIBITION, 2005, :198-203

[9] Design of Fully Integrated Impedimetric CMOS Biosensor for DNA Detection [J].

Fan, Vinny Lam Siu ;

Yusof, Yusmeeraz Binti .

MICRO/NANO SCIENCE AND ENGINEERING, 2014, 925 :524-528

[10] Design of fully integrated impedimetric CMOS biosensor for DNA detection [J].

Fan, Vinny Lam Siu ;

Yusof, Yusmeeraz .

INTERNATIONAL JOURNAL OF NANOELECTRONICS AND MATERIALS, 2015, 8 (01) :55-60

← 1 2 3 4 5 →