Yield evaluation of gold sensor electrodes used for fully electronic DNA detection arrays on CMOS

Gold electrodes are required as sensor elements to enable a fully electronic DNA detection technique. Aiming for the integration of a gold backend module into a standard CMOS process, the yield of this extra process is evaluated. Data are presented from adequate passive test structures and from a fully processed active CMOS chip operated in a test mode. Experiments with DNA molecules applied to the chip demonstrate proper biochemical operation obtained with the considered process options. High yield is achieved. (C) 2002 Elsevier Science Ltd. All rights reserved.