Adsorption of H, NHx, BHx, and BBrx on a (110) surface of c-BN:: A quantum-mechanical DFT study

被引:7
作者
Arvidsson, I. [1 ]
Larsson, K. [1 ]
机构
[1] Uppsala Univ, Dept Chem Mat, SE-75121 Uppsala, Sweden
关键词
DFT; boron nitride; adsorption; ALD;
D O I
10.1016/j.diamond.2006.04.015
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The adsorption of H, NHx, BHx and BBrx (x = 1, 2 and 3) on hydrogen-terminated (110) surfaces of c-BN has been investigated theoretically. Density Functional Theory (DFT) methods were used in order to study the adsorption processes of these different species on both nitrogen and boron sites at the surfaces. With one exception, all adsorption processes were found to be exothermic and in the order; BBr. >> BH2. approximate to H-. > BH. >> NH. approximate to BBr2. > NH2. >> BH3. > NH3. > BBr3. for a nitrogen site, and NH2. > NH. > BBr. > H-. > BH. > BH2. approximate to BBr2. >> BBr3. approximate to NH3. approximate to BH3. for a boron site. The exception was NH3 being bonded to a surface N site, for which the reaction was slightly endothermic. The various modeling parameters that were used in the calculations of these adsorption energies have been chosen by performing series of extensive test calculations, in which the effect of these parameters (e.g. template size, vacuum depth, atom constraints) on bond-strength have been carefully estimated. Moreover, a semi-empirical method has been evaluated with the purpose to study the usefulness of this type of method for the polar BN compound. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:131 / 137
页数:7
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