Growth of cubic silicon carbide crystals from solution

被引:7
作者
Eid, J.
Santailler, J. L.
Ferrand, B.
Ferret, P.
Pesenti, J.
Basset, A.
Passero, A.
Mantzari, A.
Polychroniadis, E. K.
Balloud, C.
Soares, P.
Camassel, J.
机构
[1] CEA Grenoble, DOPT, LETI, F-38054 Grenoble, France
[2] Aristotle Univ Thessaloniki, Dept Phys, Thessaloniki 54124, Greece
[3] Univ Montpellier 2, Etud Semicond Grp, F-34095 Montpellier 5, France
[4] CNRS, F-34095 Montpellier 5, France
来源
SILICON CARBIDE AND RELATED MATERIALS 2005, PTS 1 AND 2 | 2006年 / 527-529卷
关键词
3C-SiC; bulk growth; solution growth;
D O I
10.4028/www.scientific.net/MSF.527-529.123
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Cubic-silicon carbide crystals have been grown from solution by using the traveling-zone method. In this technique a molten silicon zone heated by induction coils is held between two rods of polycrystalline silicon carbide. Due to the growth set-up and boundary conditions, different mass transfer mechanisms are operative : diffusion, buoyancy, Marangoni convection and forced convection. The growth experiments have been performed on various seed crystals. Cubic SiC crystals were grown with a [111] habit on the [0001] silicon faces of 4H SiC seeds. The polytype 3C-SiC was identified by Transmission Electron Microscopy. Micro Raman spectroscopy and photoluminescence analyses showed good crystalline quality with few 6H inclusions.
引用
收藏
页码:123 / 126
页数:4
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