Effect of substrate temperature on structural and optical properties of spray deposited ZnO thin films

被引：13

作者：

Larbah, Y. ^{[1
]}

Adnane, M. ^{[1
]}

Sahraoui, T. ^{[1
]}

机构：

[1] Univ Sci & Technol Oran, Lab Electron Microscopy & Mat Sci, BP 1505, El Mnaouer Oran 31000, Algeria

来源：

MATERIALS SCIENCE-POLAND | 2015年 / 33卷 / 03期

关键词：

ZnO; spray deposition; Rutherford Backscattering Spectrometry (RBS); structural; optical and electrical properties; TRANSPARENT; PYROLYSIS; GROWTH;

D O I：

10.1515/msp-2015-0062

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Undoped ZnO thin films have been prepared on glass substrates at different substrate temperatures by spray pyrolysis method. The effect of temperature on the structural, morphological and optical properties of n-type ZnO films was studied. The X-ray diffraction (XRD) results confirmed that the ZnO thin films were polycrystalline with wurtzite structure. Scanning electron microscopy (SEM) measurements showed that the surface morphology of the films changed with temperature. The studies demonstrated that the ZnO film had a transmission of about 85 % and energy gap of 3.28 eV at 450 degrees C. The RBS measurements revealed that ZnO layers with a thickness up to 200 nm had a good stoichiometry.

引用

页码：491 / 496

页数：6

共 50 条

[21] Effect of substrate temperature on the structure and optical properties of ZnO thin films deposited by reactive rf magnetron sputtering
Singh, Sukhvinder
Srinivasa, R. S.
Major, S. S.
THIN SOLID FILMS, 2007, 515 (24) : 8718 - 8722
[22] Influence of substrate temperature and Cobalt concentration on structural and optical properties of ZnO thin films prepared by Ultrasonic spray technique
Benramache, Said
Benhaoua, Boubaker
SUPERLATTICES AND MICROSTRUCTURES, 2012, 52 (04) : 807 - 815
[23] Physical properties of ZnO thin films deposited at various substrate temperatures using spray pyrolysis
Rao, T. Prasada
Kumar, M. C. Santhosh
Safarulla, A.
Ganesan, V.
Barman, S. R.
Sanjeeviraja, C.
PHYSICA B-CONDENSED MATTER, 2010, 405 (09) : 2226 - 2231
[24] Effect of nickel doping on structural, optical, electrical and ethanol sensing properties of spray deposited nanostructured ZnO thin films
Muniyandi, Indumathy
Mani, Ganesh Kumar
Shankar, Prabakaran
Rayappan, John Bosco Balaguru
CERAMICS INTERNATIONAL, 2014, 40 (06) : 7993 - 8001
[25] Investigations on structural, optical and electrical parameters of spray deposited ZnSe thin films with different substrate temperature
M. Bedir
M. Öztaş
Ö. F. Bakkaloğlu
R. Ormanci
The European Physical Journal B - Condensed Matter and Complex Systems, 2005, 45 : 465 - 471
[26] Influence of Annealing on Properties of Spray Deposited ZnO Thin Films
Nadarajah, Kalyani
Chee, Ching Yern
Tan, Chou Yong
JOURNAL OF NANOMATERIALS, 2013, 2013
[27] Effect of Nozzle-Substrate Distance on the Structural and Optical Properties of AZO Thin Films Deposited by Spray Pyrolysis Technique
Hazmin, Sofea Nabila
Mamat, Mohamad Hafiz
Muhamad, Nur Amalina
4TH INTERNATIONAL SCIENCES, TECHNOLOGY AND ENGINEERING CONFERENCE (ISTEC) 2020: EXPLORING MATERIALS FOR THE FUTURE, 2021, 2332
[28] Structural and optical properties of nanostructural V2O5 thin films deposited by spray pyrolysis technique: Effect of the substrate temperature
Irani, R.
Rozati, S. M.
Beke, S.
MATERIALS CHEMISTRY AND PHYSICS, 2013, 139 (2-3) : 489 - 493
[29] Effect of substrate position on Structural, Morphological, and Optical properties of reactively sputtered ZnO thin films
Kumar, J. Vinoth
Matsumoto, Y.
Maldonado, A.
Olvera, M. de la L.
2016 13TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING, COMPUTING SCIENCE AND AUTOMATIC CONTROL (CCE), 2016,
[30] Effect of the substrate temperature on the electrical and structural properties of spray-deposited SnO2:F thin films
Ikhmayies, Shadia J.
Ahmad-Bitar, Riyad N.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2009, 12 (03) : 122 - 125

← 1 2 3 4 5 →