Effect of substrate temperature on structural and optical properties of spray deposited ZnO thin films

被引：13

作者：

Larbah, Y. ^{[1
]}

Adnane, M. ^{[1
]}

Sahraoui, T. ^{[1
]}

机构：

[1] Univ Sci & Technol Oran, Lab Electron Microscopy & Mat Sci, BP 1505, El Mnaouer Oran 31000, Algeria

来源：

MATERIALS SCIENCE-POLAND | 2015年 / 33卷 / 03期

关键词：

ZnO; spray deposition; Rutherford Backscattering Spectrometry (RBS); structural; optical and electrical properties; TRANSPARENT; PYROLYSIS; GROWTH;

D O I：

10.1515/msp-2015-0062

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Undoped ZnO thin films have been prepared on glass substrates at different substrate temperatures by spray pyrolysis method. The effect of temperature on the structural, morphological and optical properties of n-type ZnO films was studied. The X-ray diffraction (XRD) results confirmed that the ZnO thin films were polycrystalline with wurtzite structure. Scanning electron microscopy (SEM) measurements showed that the surface morphology of the films changed with temperature. The studies demonstrated that the ZnO film had a transmission of about 85 % and energy gap of 3.28 eV at 450 degrees C. The RBS measurements revealed that ZnO layers with a thickness up to 200 nm had a good stoichiometry.

引用

页码：491 / 496

页数：6

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