Preparation and characterization of transparent indium- doped TiO2 films deposited by MOCVD

被引：14

作者：

Zhao, Wei ^{[1
]}

Wang, Weiguang ^{[1
]}

Feng, Xianjin ^{[1
]}

He, Linan ^{[1
]}

Cao, Qiong ^{[1
]}

Luan, Caina ^{[1
]}

Ma, Jin ^{[1
]}

机构：

[1] Shandong Univ, Sch Microelect, Jinan 250100, Peoples R China

来源：

CERAMICS INTERNATIONAL | 2017年 / 43卷 / 11期

基金：

中国国家自然科学基金;

关键词：

Films; Electrical properties; TiO2; THIN-FILMS; OPTICAL-PROPERTIES; NANOPARTICLES; COMPOSITE;

D O I：

10.1016/j.ceramint.2017.03.182

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Titanium dioxide (TiO2) films doped with different indium (In) concentrations have been prepared on SrTiO3 (STO) substrates by high vacuum metalorganic chemical vapor deposition (MOCVD). X-ray diffraction (XRD) analyses revealed the TiO2 films doped with low In concentrations to be [001] oriented anatase phase and the films with high In concentrations to present polycrystalline structures. The 1.8% In-doped TiO2 film exhibited the best electrical conductivity properties with the lowest resistivity of 8.68x 10(-2) Omega cm, a Hall mobility of 10.9 cm(2) V-1 s(-1) and a carrier concentration of 6.5x10(18) cm(-3). The films showed excellent transparency with average transmittances of over 85% in the visible range.

引用

页码：8391 / 8395

页数：5

共 29 条

[1] Visible-light active mesoporous, nanocrystalline N,S-doped and co-doped titania photocatalysts synthesized by non-hydrolytic sol-gel route [J].

Albrbar, Asma Juma ;

Djokic, Veljko ;

Bjelajac, Andjelika ;

Kovac, Janez ;

Cirkovic, Jovana ;

Mitric, Miodrag ;

Janackovic, Djordje ;

Petrovic, Rada .

CERAMICS INTERNATIONAL, 2016, 42 (15) :16718-16728

[2] Synthesis and investigation of crystal structure and optical properties of brookite TiO2 nanoparticles capped with (2-chloroquinoline-3-yl) methanol [J].

Asadollahi, Elham ;

Youzbashi, Amir Ali ;

Keyanpour-Rad, Mansoor .

JOURNAL OF MOLECULAR STRUCTURE, 2017, 1128 :612-618

[3] Nitrogen complex species and its chemical nature in TiO2 for visible-light sensitized photocatalysis [J].

Asahi, Ryoji ;

Morikawa, Takeshi .

CHEMICAL PHYSICS, 2007, 339 (1-3) :57-63

[4] Facile synthesis of Ni-doped TiO2 ultrathin nanobelt arrays with enhanced photocatalytic performance [J].

Bai, Jun-Qiang ;

Wen, Wei ;

Wu, Jin-Ming .

CRYSTENGCOMM, 2016, 18 (10) :1847-1853

[5] Vacancy-induced room-temperature ferromagnetism in Ga-TiO2 [J].

Bao, N. N. ;

Yi, J. B. ;

Fan, H. M. ;

Qin, X. B. ;

Zhang, P. ;

Wang, B. Y. ;

Ding, J. ;

Li, S. .

SCRIPTA MATERIALIA, 2012, 66 (10) :821-824

[6] Zr-doped TiO2 supported on delaminated clay materials for solar photocatalytic treatment of emerging pollutants [J].

Belver, C. ;

Bedia, J. ;

Rodriguez, J. J. .

JOURNAL OF HAZARDOUS MATERIALS, 2017, 322 :233-242

[7] Ag nanoparticles modified TiO2 spherical heterostructures with enhanced gas-sensing performance [J].

Cheng, Xiaoli ;

Xu, Yingming ;

Gao, Shan ;

Zhao, Hui ;

Huo, Lihua .

SENSORS AND ACTUATORS B-CHEMICAL, 2011, 155 (02) :716-721

[8] Band gap tuning of epitaxial SrTiO3-δ/Si(001) thin films through strain engineering [J].

Cottier, Ryan J. ;

Steinle, Nathan A. ;

Currie, Daniel A. ;

Theodoropoulou, Nikoleta .

APPLIED PHYSICS LETTERS, 2015, 107 (22)

[9] Dielectric properties of alumina doped with TiO2 from 13 to 73 GHz [J].

Di Marco, D. ;

Drissi, K. ;

Geffroy, P. -M. ;

Delhote, N. ;

Tantot, O. ;

Verdeyme, S. ;

Chartier, T. .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2017, 37 (02) :641-646

[10] Determination of optical properties in nanostructured TiO2 thin film fabricated by electron beam physical vapor deposition [J].

Eshaghi, Akbar ;

Aghaei, Abbas Ail .

JOURNAL OF OPTICAL TECHNOLOGY, 2016, 83 (01) :26-29

← 1 2 3 →