Capacitively coupled plasma used to simulate Titan's atmospheric chemistry

被引:51
作者
Alcouffe, G. [1 ]
Cavarroc, M. [2 ]
Cernogora, G. [1 ]
Ouni, F. [1 ]
Jolly, A. [3 ]
Boufendi, L. [4 ]
Szopa, C. [5 ]
机构
[1] Univ Versailles St Quentin, LATMOS BP3, F-91371 Verrieres Le Buisson, France
[2] MID Dreux Innovat, F-28500 Vernouillet, France
[3] Univ Paris 12, LISA, F-94010 Creteil, France
[4] Univ Orleans, GREMI, BP6744, F-45067 Orleans 2, France
[5] Univ Paris 06, UPMC, LATMOS BP3, F-91371 Verrieres Le Buisson, France
关键词
CAVITY PERTURBATION TECHNIQUE; DUSTY PLASMA; ACTIVE NITROGEN; RF DISCHARGE; ORGANIC-CHEMISTRY; AR/C2H2; PLASMAS; SILANE; RECOMBINATION; PRESSURES; DENSITIES;
D O I
10.1088/0963-0252/19/1/015008
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A complex chemistry in Titan's atmosphere leads to the formation of organic solid aerosols. We use a radio-frequency (RF) capacitively coupled plasma discharge produced in different N(2)-CH(4) mixtures (from 0% to 10% of CH(4)) to simulate this chemistry. The work presented here was devoted to the study of the plasma discharge. In our experiment, the electron density is measured by the resonant cavity method and is about 10(15) m(-3) in pure N(2) plasma at 30 W excitation RF power. It decreases by a factor of 2 as soon as CH(4) is present in the discharge, even for a proportion as small as 2% of CH(4). An optical emission spectroscopy diagnostic is installed on the experiment to study the evolution of the N(2) bands and to perform actinometry measurements using Ar lines. This diagnostic allowed us to measure variations in the electron temperature and to show that a decrease in the density of the electrons can be compensated by an increase in their energy. We have also used an experimental setup where the plasma is tuned in a pulsed mode, in order to study the formation of dust particles. We observed variations in the self-bias voltage, the RF injected power and the intensities of the nitrogen bands, which indicated that dust particles were formed. The characteristic dust formation time varied, depending on the experimental conditions, from 4 to 110 s. It was faster for higher pressures and for smaller proportions of CH(4) in the gas mixture.
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页数:11
相关论文
共 55 条
[1]   PROBE THEORIES AND APPLICATIONS - MODERN ASPECTS [J].
ALLEN, JE .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1995, 4 (02) :234-241
[2]  
[Anonymous], J PHOTOCHEM
[3]  
BELENGUER P, 1990, PHYS REV A, V41, P8
[4]   Experimental simulation of Titan's atmosphere: Detection of ammonia and ethylene oxide [J].
Bernard, JM ;
Coll, P ;
Coustenis, A ;
Raulin, F .
PLANETARY AND SPACE SCIENCE, 2003, 51 (14-15) :1003-1011
[5]   Gas discharge plasmas and their applications [J].
Bogaerts, A ;
Neyts, E ;
Gijbels, R ;
van der Mullen, J .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2002, 57 (04) :609-658
[6]   Particulate formation and dusty plasma behaviour in argon-silane RF discharge [J].
Bouchoule, A. ;
Boufendi, L. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1993, 2 (03) :204-213
[7]  
Bouchoule Andre, 1999, Dusty plasmas: physics, chemistry, and technological impacts in plasma processing
[8]   Particle nucleation and growth in a low-pressure argon-silane discharge [J].
Boufendi, L. ;
Bouchoule, A. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1994, 3 (03) :262-267
[9]   Single-crystal silicon nanoparticles: An instability to check their synthesis [J].
Cavarroc, M. ;
Mikikian, M. ;
Perrier, G. ;
Boufendi, L. .
APPLIED PHYSICS LETTERS, 2006, 89 (01)
[10]  
CAVARROC M, 2007, THESIS U ORLEANS FRA