Carbon nanotube-based three-dimensional monolithic optoelectronic integrated system

被引:63
|
作者
Liu, Yang [1 ,2 ]
Wang, Sheng [1 ,3 ]
Liu, Huaping [4 ,5 ]
Peng, Lian-Mao [1 ,2 ,3 ]
机构
[1] Peking Univ, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
[2] Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
[3] Peking Univ, Dept Elect, Beijing 100871, Peoples R China
[4] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
[5] Collaborat Innovat Ctr Quantum Matter, Beijing 100190, Peoples R China
来源
NATURE COMMUNICATIONS | 2017年 / 8卷
基金
中国国家自然科学基金;
关键词
ELECTRICALLY DRIVEN; LIGHT; ELECTRONICS; PHOTODETECTORS; PHOTONICS;
D O I
10.1038/ncomms15649
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Single material-based monolithic optoelectronic integration with complementary metal oxide semiconductor-compatible signal processing circuits is one of the most pursued approaches in the post-Moore era to realize rapid data communication and functional diversification in a limited three-dimensional space. Here, we report an electrically driven carbon nanotube-based on-chip three-dimensional optoelectronic integrated circuit. We demonstrate that photovoltaic receivers, electrically driven transmitters and on-chip electronic circuits can all be fabricated using carbon nanotubes via a complementary metal oxide semiconductor-compatible low-temperature process, providing a seamless integration platform for realizing monolithic three-dimensional optoelectronic integrated circuits with diversified functionality such as the heterogeneous AND gates. These circuits can be vertically scaled down to sub-30 nm and operates in photovoltaic mode at room temperature. Parallel optical communication between functional layers, for example, bottom-layer digital circuits and top-layer memory, has been demonstrated by mapping data using a 2 x 2 transmitter/receiver array, which could be extended as the next generation energy-efficient signal processing paradigm.
引用
收藏
页数:8
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